Skip to content. | Skip to navigation

Sections
Personal tools
You are here: Home / Equipment / Chemical Vapor Deposition / Low Pressure CVD / LPCVD tests / bpsg_qual_9-25-08

bpsg_qual_9-25-08

 



2008-09-25 [1634]  J20 1

2008-09-25 [1638]  J20 2

2008-09-25 [1641]  J20 3

2008-09-25 [1644]  J20 4

2008-09-25 [1647]  J20 5

2008-09-25 [1650]  J20 6



Analysis Strategy:  Silicon Oxide (100-10,000Ang) Analysis Strategy:  Silicon Oxide (100-10,000Ang) Analysis Strategy:  Silicon Oxide (100-10,000Ang) Analysis Strategy:  Silicon Oxide (100-10,000Ang) Analysis Strategy:  Silicon Oxide (100-10,000Ang) Analysis Strategy:  Silicon Oxide (100-10,000Ang)


































Fit Parm: Average Oxide thickness index of refraction @ 633nm MSE
Fit Parm: Average Oxide thickness index of refraction @ 633nm MSE
Fit Parm: Average Oxide thickness index of refraction @ 633nm MSE
Fit Parm: Average Oxide thickness index of refraction @ 633nm MSE
Fit Parm: Average Oxide thickness index of refraction @ 633nm MSE
Fit Parm: Average Oxide thickness index of refraction @ 633nm MSE


-------------------- -------------------- -------------------- -------------------- -------------------- -------------------- -------------------- -------------------- -------------------- -------------------- -------------------- -------------------- -------------------- -------------------- -------------------- -------------------- -------------------- -------------------- -------------------- -------------------- -------------------- -------------------- -------------------- --------------------


Average: 3497.1 1.4512 35.328
Average: 3530.1 1.4525 48.501
Average: 3944.2 1.4544 100.61
Average: 3660.8 1.4534 60.412
Average: 3749.8 1.453 53.884
Average: 3757.6 1.4531 48.749
Horizontal Vertical Minimum: 3365.3 1.4489 7.27
Minimum: 3436.6 1.4514 8.6
Minimum: 3629.7 1.4499 8.56
Minimum: 3514.4 1.4523 7.91
Minimum: 3656.3 1.4517 7.6
Minimum: 3696.8 1.4516 7.55


Maximum: 3802.4 1.4547 56.66
Maximum: 3747.2 1.4541 61.22
Maximum: 4219.9 1.4609 191.63
Maximum: 3872.4 1.4586 90.16
Maximum: 3968.6 1.4538 79.16
Maximum: 3974.4 1.4542 70.18


Std Dev: 124.92 0.001555 13.264
Std Dev: 102.93 7.77E-04 16.099
Std Dev: 196.87 0.00331 61.498
Std Dev: 94.424 0.001964 23.769
Std Dev: 97.098 5.77E-04 19.209
Std Dev: 85.521 7.84E-04 17.375


% Range: 6.2486 0.20017 69.903
% Range: 4.3996 0.092598 54.246
% Range: 7.4821 0.37714 90.977
% Range: 4.8906 0.21605 68.074
% Range: 4.1651 0.072955 66.401
% Range: 3.6943 0.08912 64.237


-------------------- -------------------- -------------------- -------------------- -------------------- -------------------- -------------------- -------------------- -------------------- -------------------- -------------------- -------------------- -------------------- -------------------- -------------------- -------------------- -------------------- -------------------- -------------------- -------------------- -------------------- -------------------- -------------------- --------------------

-4 1:(0.00,4.00) 3802.4 1.4547 7.27
1:(0.00,4.00) 3747.2 1.4523 8.6
1:(0.00,4.00) 3629.7 1.4512 8.56
1:(0.00,4.00) 3872.4 1.4529 7.91
1:(0.00,4.00) 3968.6 1.4538 7.6
1:(0.00,4.00) 3974.4 1.454 7.55

-2 2:(0.00,2.00) 3545.4 1.4517 56.66
2:(0.00,2.00) 3571.3 1.4529 53.49
2:(0.00,2.00) 3712.2 1.4537 35.92
2:(0.00,2.00) 3682.1 1.4532 69.99
2:(0.00,2.00) 3818.3 1.4531 57.62
2:(0.00,2.00) 3790.9 1.4528 60.39


3:(0.00,0.00) 3461.3 1.4506 38.08
3:(0.00,0.00) 3483.1 1.4524 54.51
3:(0.00,0.00) 3988.2 1.4499 111.52
3:(0.00,0.00) 3624.8 1.4531 65.99
3:(0.00,0.00) 3716.7 1.4528 63.49
3:(0.00,0.00) 3717.3 1.4533 51.45

2 4:(0.00,-2.00) 3422.1 1.4508 37.81
4:(0.00,-2.00) 3436.6 1.452 59.48
4:(0.00,-2.00) 4209.6 1.4553 184.96
4:(0.00,-2.00) 3618.1 1.4526 66.21
4:(0.00,-2.00) 3656.3 1.4527 57.09
4:(0.00,-2.00) 3696.8 1.4529 49.56

4 5:(0.00,-4.00) 3365.3 1.4516 40.56
5:(0.00,-4.00) 3450.9 1.4514 57.86
5:(0.00,-4.00) 4219.9 1.4609 191.63
5:(0.00,-4.00) 3680.1 1.4523 58.23
5:(0.00,-4.00) 3660.6 1.453 57.72
5:(0.00,-4.00) 3707.8 1.4524 51.25
4
6:(-4.00,0.00) 3439 1.4489 27.63
6:(-4.00,0.00) 3625.9 1.4541 41.68
6:(-4.00,0.00) 3965.4 1.4534 79.74
6:(-4.00,0.00) 3676.3 1.4525 47.22
6:(-4.00,0.00) 3699.8 1.4517 49.9
6:(-4.00,0.00) 3739.5 1.4516 43.05
2
7:(-2.00,0.00) 3460.9 1.4504 32.12
7:(-2.00,0.00) 3533.1 1.4522 50.3
7:(-2.00,0.00) 3956.7 1.4525 84.63
7:(-2.00,0.00) 3640.4 1.4529 54.94
7:(-2.00,0.00) 3706.5 1.4532 58.74
7:(-2.00,0.00) 3734.4 1.4531 47.87
-2
8:(2.00,0.00) 3478.2 1.4509 42.71
8:(2.00,0.00) 3466.6 1.452 61.22
8:(2.00,0.00) 3961.1 1.4574 130.37
8:(2.00,0.00) 3638.6 1.4526 83.06
8:(2.00,0.00) 3745.8 1.4531 79.16
8:(2.00,0.00) 3724.8 1.4532 70.18
-4
9:(4.00,0.00) 3499.5 1.4517 35.11
9:(4.00,0.00) 3456.1 1.4531 49.37
9:(4.00,0.00) 3854.6 1.4551 78.19
9:(4.00,0.00) 3514.4 1.4586 90.16
9:(4.00,0.00) 3775.3 1.4533 53.64
9:(4.00,0.00) 3732.1 1.4542 57.44

Document Actions