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TylanNitride 9-25-08

Nitride 2 test 9-25-08

 

2008-09-26 [1646]  tylannitride_9-25-08-1
2008-09-26 [1649]  tylannitride_9_25_08_2
2008-09-26 [1653]  tylannitride_9-25-08-3
2008-09-26 [1658]  tylannitride_9-25-08-4
2008-09-26 [1700]  tylannitride_9-25-08-5
2008-09-26 [1703]  tylannitride_9-25-08-6
Analysis Strategy:  STS PECVD Nitride
Analysis Strategy:  STS PECVD Nitride
Analysis Strategy:  STS PECVD Nitride
Analysis Strategy:  STS PECVD Nitride
Analysis Strategy:  STS PECVD Nitride
Analysis Strategy:  STS PECVD Nitride






























Fit Parm: Average Nitride thickness index of refraction @ 633nm MSE
Fit Parm: Average Nitride thickness index of refraction @ 633nm MSE
Fit Parm: Average Nitride thickness index of refraction @ 633nm MSE
Fit Parm: Average Nitride thickness index of refraction @ 633nm MSE
Fit Parm: Average Nitride thickness index of refraction @ 633nm MSE
Fit Parm: Average Nitride thickness index of refraction @ 633nm MSE
-------------------- -------------------- -------------------- -------------------- -------------------- -------------------- -------------------- -------------------- -------------------- -------------------- -------------------- -------------------- -------------------- -------------------- -------------------- -------------------- -------------------- -------------------- -------------------- -------------------- -------------------- -------------------- -------------------- --------------------
Average: 1024.5 2.0197 6.4044
Average: 1044.3 2.0198 6.5011
Average: 1049.2 2.0198 6.1044
Average: 1049.6 2.0195 6.1011
Average: 1046.8 2.0193 6.2367
Average: 1048.3 2.0188 6.0889
Minimum: 1015.6 2.0186 5.73
Minimum: 1037.8 2.0189 5.09
Minimum: 1040.6 2.0194 4.85
Minimum: 1042.9 2.0187 5.51
Minimum: 1038.1 2.0184 5.71
Minimum: 1041.1 2.0178 5.2
Maximum: 1040.8 2.0207 6.96
Maximum: 1055.9 2.0211 7.19
Maximum: 1063.8 2.0208 6.77
Maximum: 1060.4 2.0204 6.6
Maximum: 1057.3 2.0205 6.96
Maximum: 1059.3 2.0198 6.84
Std Dev: 9.2953 6.60E-04 0.40584
Std Dev: 6.2181 6.70E-04 0.60629
Std Dev: 7.5829 4.75E-04 0.57048
Std Dev: 6.0762 5.48E-04 0.32436
Std Dev: 7.1543 5.68E-04 0.37034
Std Dev: 6.2939 6.32E-04 0.46388
% Range: 1.2284 0.051243 9.6027
% Range: 0.86855 0.053471 16.151
% Range: 1.1028 0.035648 15.726
% Range: 0.8379 0.042093 8.9328
% Range: 0.9199 0.051006 10.021
% Range: 0.86519 0.048296 13.467
-------------------- -------------------- -------------------- -------------------- -------------------- -------------------- -------------------- -------------------- -------------------- -------------------- -------------------- -------------------- -------------------- -------------------- -------------------- -------------------- -------------------- -------------------- -------------------- -------------------- -------------------- -------------------- -------------------- --------------------
1:(0.00,4.00) 1019 2.0189 6.44
1:(0.00,4.00) 1042.4 2.0196 6.95
1:(0.00,4.00) 1063.8 2.0208 6.73
1:(0.00,4.00) 1046.4 2.0187 6.15
1:(0.00,4.00) 1049.6 2.0193 5.97
1:(0.00,4.00) 1047.1 2.0189 6.23
2:(0.00,2.00) 1015.6 2.0186 6.5
2:(0.00,2.00) 1038.3 2.0189 6.77
2:(0.00,2.00) 1052.7 2.0197 6.16
2:(0.00,2.00) 1042.9 2.0196 5.93
2:(0.00,2.00) 1041.5 2.0193 6.06
2:(0.00,2.00) 1041.1 2.0187 6.13
3:(0.00,0.00) 1016.2 2.0198 6.44
3:(0.00,0.00) 1037.8 2.0197 6.65
3:(0.00,0.00) 1044.3 2.0197 6.08
3:(0.00,0.00) 1044.7 2.0193 6.16
3:(0.00,0.00) 1038.1 2.019 6.19
3:(0.00,0.00) 1042 2.0182 6.17
4:(0.00,-2.00) 1024.2 2.0196 6.66
4:(0.00,-2.00) 1043.3 2.0197 6.63
4:(0.00,-2.00) 1040.8 2.0196 6.31
4:(0.00,-2.00) 1051.1 2.0195 6.14
4:(0.00,-2.00) 1042.2 2.0191 6.37
4:(0.00,-2.00) 1048.5 2.0192 6.23
5:(0.00,-4.00) 1040.8 2.0204 6.84
5:(0.00,-4.00) 1055.9 2.0199 6.63
5:(0.00,-4.00) 1040.6 2.0194 6.23
5:(0.00,-4.00) 1060.4 2.0204 6.19
5:(0.00,-4.00) 1057.3 2.0197 6.42
5:(0.00,-4.00) 1059.3 2.0194 6.43
6:(-4.00,0.00) 1038.6 2.0197 5.73
6:(-4.00,0.00) 1051.8 2.0211 5.09
6:(-4.00,0.00) 1050.4 2.0203 4.85
6:(-4.00,0.00) 1057.8 2.0189 6.43
6:(-4.00,0.00) 1055.5 2.0191 6.49
6:(-4.00,0.00) 1056.5 2.0198 5.2
7:(-2.00,0.00) 1022.6 2.02 6.12
7:(-2.00,0.00) 1041.4 2.0191 6.12
7:(-2.00,0.00) 1045.4 2.0194 5.74
7:(-2.00,0.00) 1049.6 2.0194 5.8
7:(-2.00,0.00) 1042 2.0184 5.96
7:(-2.00,0.00) 1046.8 2.0178 5.69
8:(2.00,0.00) 1017.9 2.0207 6.96
8:(2.00,0.00) 1040.2 2.0205 7.19
8:(2.00,0.00) 1048.2 2.0195 6.77
8:(2.00,0.00) 1044.4 2.0199 6.6
8:(2.00,0.00) 1042 2.0194 6.96
8:(2.00,0.00) 1042.9 2.0193 6.84
9:(4.00,0.00) 1025.9 2.0198 5.95
9:(4.00,0.00) 1047.3 2.02 6.48
9:(4.00,0.00) 1056.3 2.0199 6.07
9:(4.00,0.00) 1049.5 2.0201 5.51
9:(4.00,0.00) 1053.4 2.0205 5.71
9:(4.00,0.00) 1050.8 2.0184 5.88

 

 

nitride_9-25-08

 

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