Skip to content. | Skip to navigation

Personal tools
You are here: Home / Equipment / Chemical Vapor Deposition / Low Pressure CVD / CVD-nanotube



The First Nano CVD furnace is dedicated to carbon nanotube synthesis and can accommodate multiple pieces or a 4" wafer. Methane, hydrogen and ethanol are available as process gases and thus provide versatility for both SWCNT growth as well as vertical forest growth. Process recipes for horizontally aligned SWCNT growth on ST-cut quartz (available from the SNF stockroom) have been optimized and are available to the user, with typical yields of 1-5 SWCNTs per micron depending on the catalyst used. Many thanks to Greg Pitner for his contribution to this page.

CVD-Nanotube - Read More…

Document Actions