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MOCVD

Overall review of the MOCVD systems in the SNF. aix200: a gold level contamination, Aixtron 200/4 MOCVD system for III-V and dilute nitride deposition. Operational. aix-ccs: contaminated group, but allow only clean substrates, Aixtron close coupled showerhead MOCVD system for III-N deposition. Testing, operational starting January 2015.

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