Summary of SiO2 Quick Check
Quick checks are run to look at the functionality of the tool in a timely manner. Data taken are; Average thickness (for SiO2 2 min dep), Standard Dev., Refractive Index, % uniformity and Deposition Rate. Reasons for the quick check are given in the comments.
CCP PECVD Quick Check for SiO2
12 May 2014
Recipe SiO350-1 for 2 mins
Comments; Clean & coat run before dep, user reported bad uniformity.