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Pinhole Testing

Descriptions of how the tests were run and the results
Particle Counter
Study of the presence and density of pinholes in ccp films through measurements made on the particle counter in several ranges of particle size.
Metal Layer H2SO4 Etch
Study of the presence and density of pinholes in ccp films through measurements made on the visibility of H2SO4 etching of underlying layer of metal.
Xactix Etch
Study of the presence and density of pinholes in ccp films through measurements made on the Xactix etching of the underlying silicon exposed by pinholes.

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