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HDPECVD Recipe Template

This template can be used to create and archive recipes.

HDPECVD Recipe Template

 

 

 

Parameter
Step1

Step2
Step3
Step4
Step5
Step6
Step7
Step8
Process Time








Over Etch Time Percent








Pressure/Position Evacuation Condition








Pressure







Throttle Valve Position Set Point








Process End Condition








Recipe Restart Sequence Name








Recipe Abort Sequence Name







N2a








SF6







O2








Ar








 N2b

   


 
 N2c

     

 
 SiH4
 
 
 

 N2d


 
 

He Cooler Mode








He Cooler Pressure Setpoint








He Cooler Flow Setpoint







Bias RF Forward Setpoint








IPC Forward Power Setpoint








 Bias Match Control Mode
             
 Bias Match Load Position    
     
 
 Bias Match Tune Position    
     
 
IPC Match Control Mode








IPC Match Load Position








IPC Match Tune Position







Temperature Electrode Setpoint








Temperature Lid Setpoint







Temperature Spool Setpoint







Execute if later Step Restarted








External Detector Endpoint Recipe Name








No Endpoint found alarm severity


 




 IPC RF Reflected Power Error Timeout
     

 

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