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HDP_Etchback

Here is a copy of the recipe HDP_Etchback. It is used for endpoint determined etching of the process module (chamber). The recipe should be run when there is 3.5-4.0um accumulated deposition or when a user wants to keep their samples in clean status.

 

HDP_Etchback

 

Parameter
1:Clean:1
Gas Stablilize

2:Clean:2
Light Step
3:Clean:3
Etchback
4:Clean:4
O2 Stabilize
5:Clean:5
O2 Light Step
6:Clean:6
O2 Clean
7:Clean:7
N2+N2 Flush

Process Time
5
10
3600
5
10
60
15

Over Etch Time Percent
0
0
0
0
0
0
0

Pressure/Position Evacuation Condition
#pressure
#pressure #pressure #pressure #pressure #pressure #pressure
Pressure 20.0
20.0
20.0
15.0
15.0
15.0
15.0

Throttle Valve Position Set Point
0
0
0
0
0
0
0

Process End Condition
#time
#time #endpoint
detect
#time #time #time #time
Recipe Restart Sequence Name








Recipe Abort Sequence Name







N2a
0
0
0
0
0
0
26

SF6 10
10
80
0
0
0
0

O2
20
20
20
75
75
75
0

Ar
50
50
30
0
0
0
0

 N2b 0
0
 0  0 0
0
0
 
 N2c 0
0
 0  0  0 0
0
 
 SiH4 0
 0 0
 0 0
 0 0

 N2d 0
0
0
 0 0
 0 25

He Cooler Mode
#pressure
#pressure #pressure #pressure #pressure #pressure #pressure
He Cooler Pressure Setpoint
4000.0
4000.0 4000.0 4000.0 4000.0 4000.0 4000.0
He Cooler Flow Setpoint 0
0
0
0
0
0
0

Bias RF Forward Setpoint
0
100
10
0
100
25
0

IPC Forward Power Setpoint
0
1500
1500
0
1000
1000
0

 Bias Match Control Mode #man>auto
#auto
 #auto  #man>auto  #auto  #auto  #auto  
 Bias Match Load Position  50  0 0
 50  0  0 0
 
 Bias Match Tune Position  50  0 0
 50  0  0 0
 
IPC Match Control Mode
#man>auto #auto #auto #man>auto #auto #auto #auto
IPC Match Load Position
32
0
0
35
0
0
0

IPC Match Tune Position 68
0
0
65
0
0
0

Temperature Electrode Setpoint
90
90 90 90 90 90 90
Temperature Lid Setpoint 90 90 90 90 90 90 90
Temperature Spool Setpoint 90 90 90 90 90 90 90
Execute if later Step Restarted
false
false false false false false false
External Detector Endpoint Recipe Name
#none
#none #HDP_
etchSNF
#none #none #none #none
No Endpoint found alarm severity
#warning
#warning  #warning #warning #warning #warning #warning
 IPC RF Reflected Power Error Timeout
     

 

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