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HDP_SiNx

Here is a copy of the recipe HDP_SiNx

HDP_SiNx

 

 

 

Parameter

1:SiNx1
Thermal Soak

2:SiNx2
Gas Stabilize
3:SiNx3
Light Step
4:SiNx4
Dep Step
5:SiNx5
N2+N2 Flush


Process Time
10
30
6
180
15


Over Etch Time Percent
0
0
0
0
0


Pressure/Position Evacuation Condition
#pressure
#pressure #pressure #pressure #pressure

Pressure 4
4
4
4
15


Throttle Valve Position Set Point
0.0
0.0
0.0
0.0
0.0


Process End Condition
Time
Time Time Time Time

Recipe Restart Sequence Name







Recipe Abort Sequence Name






N2a
21
21
21
21
25


SF6 0
0
0
0
0


O2
0
0
0
0
0


Ar
50
50
50
50
0


 N2b 0
0
 0  0 0

 
 N2c 0
0
 0  0  0
 
 SiH4 0
 25 25
 25 0
 
 N2d 0
0
0
 0 0
 
He Cooler Mode
#pressure #pressure #pressure #pressure #pressure

He Cooler Pressure Setpoint
4000.0
4000.0 4000.0 4000.0 4000.0

He Cooler Flow Setpoint 0.0
0.0
0.0
0.0
0.0


Bias RF Forward Setpoint
0
0
100
0
0


IPC Forward Power Setpoint
8
8
800
1000
8


 Bias Match Control Mode #man-auto
 #automatic  #automatic  #automatic  #automatic    
 Bias Match Load Position  50  0 0
 0  0    
 Bias Match Tune Position  50  0 0
 0  0    
IPC Match Control Mode
#man-auto #automatic #automatic #automatic #automatic

IPC Match Load Position
45
0
0
0
0


IPC Match Tune Position 60
0
0
0
0


Temperature Electrode Setpoint
90
90
90
90 90


Temperature Lid Setpoint 90
90
90
90
90

Temperature Spool Setpoint 90
90
90
90
90


Execute if later Step Restarted
False
False False False False

External Detector Endpoint Recipe Name
#none #none #none #none #none

No Endpoint found alarm severity
#warning
#warning  #warning #warning #warning

 IPC RF Reflected Power Error Timeout
     

 

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