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Summary of Etchers

This chart gives a quick reference to the available plasma etchers at SNF. For a more detailed overview of etchers see the file General Information About Plasma Etching.

Etcher

Primary Materials Etched

Standard Recipes

Gases available

Wafer Size

Maximum Load Size

Contaminated?

P5000etch

Chamber A

Al/Si

CH. A METAL

Ar, BCl3, CF4, Cl2, N2, Ar

4 in

8 per loadlock pumpdown, 50 max

No

 P5000etch

Chamber B
 SiO2, SiN
 CH. B OXIDE
 CHF3,CF4, Ar, He, O2 N2
 4 in
 8 per loadlock pumpdown, 50 max  No
 P5000etch

Chamber C
 Poly Si, Si
 CH. C POLYETCH
 Cl2, HBr, NF3, CF4, SF6, He/O2
 4 in
 8 per loadlock pumpdown, 50 max  No

Amtetcher

SiO2, SiN, Si, PR

Oxide (prog #3), Via Etch (AMSL 0 layer, #4), Si Trench (#1)

O2, CHF3, SF6, Ar, NF3

4 in

24

No

Drytek2

PolySi, Si, SiN, PR

Descum, Nitride, PolySi, Contact Clean-up

O2, CF4, SF6, CHClF2

2-6 in, pieces

6

Yes and No

Drytek4

Varied

Varied (Oxide for qual)

O2, N2, Ar, SF6, CHF3, C2F6, C4F8

2-6 in, pieces

1

Yes

Gasonics

PR ashing

013 (3612 PR), 0166 (220-7 PR)

O2

4 in

25

No

Lampoly

PolySi, Si

Timed Poly Etch (#1), #2

O2, N2, H2, Cl2, HBr, CF4, C2F6

4

25

No

Matrix

PR ashing

STDO2STR

O2

4 in

25

Yes

Mrc

Varied

Varied

O2, Ar, SF6, CHF3, CHClF2

2-6 in, pieces

1

Yes

 Pt-dse  Si  Varied  SF6, C4F8, O2, Ar
 4 in
 1  Yes
 Pt-mtl  varied metals
 Varied  Cl2, BCl3, O2, SF6, Ar, CF4, CH4, N2
 4 & 6 in
 1  Yes
 Pt-ox  Ox, SiN
 Varied  C4F8, H2, Ar, CF4, O2, CHF3, He, N2
 4 in
 1  Yes

Pquest

Varied

Varied

 Ar, SF6, N2, H2, O2, CF4, He, BCl3, Cl2, SiH4*, CH4*

*plumbed but not hooked up

4 in

1

Yes

 Ox-35  GaAs, Varied
 AR-GaAs Etch (High ER)
 BCl3, Cl2, HBr, CH4, H2, Ar, O2, N2, SF6
 4 in
 1  Yes

Stsetch

Si

DEEP, SMOODEEP, SMOOSHAL,

O2CLEAN

SF6, C4F8, O2

4 in

1

No

Stsetch2

Si

Smooth-Shallow

SF6, C4F8, O2

4 in

1

No

 uetch SiO2,
isotropic
Varied HF vapor and ethanol  pieces to 8inch  1  All
xactix
Si, Ge, SiGe, isotropic
3Torr, 30second, 30 cycles
XeF2 vapor and N2
pieces to 6inch
1 6" wafer
All classes (Clean, Semi-Clean, & Gold)

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