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Amtetcher Quick Start

Quick starts are a distillation of the more verbose Operating Instructions. The user of the tool should have read and understood the full Operating Instructions for the etcher.


Amtetcher Quick Start

 

Overview:

  1. Enable system on BADGER
  2. Vent the system
  3. Load wafers
  4. Select and Verify recipe
  5. Process wafer
  6. Unload wafers
  7. Place system on Standby
  8. Disable system on CORAL

Vent:

     Initial Condition:  Recipe is on Hold

 

  1. Press ABORT
  2. Push VENT to vent the etcher.
  3. Push ALARM SILENCE to silence the alarm after the tool is vented.

 

 

 

Load Wafers

  1. Press the BELL UP buttons to raise the bell jar.
  2. Inspect the hexode by looking for signs of arcing around the trays.
  3. Remove the desired tray and fit into the LOADER.
  4. Push the LOADER’s two red buttons to release dummy wafers. 
  5. Replace dummy wafers with your device or test wafers.
  6. Push the loader buttons and replace the tray.
  7. Verify that the spring loaded tray clips on the top of the hex are flat.
  8. Push the BELL DOWN buttons to close the bell jar.

Select and Verify Recipe:

  1. Select the desired recipe by pressing PROCESS SELECT. 
  2. Put MODE SELECT into REVIEW to look at the recipe. 
  3. Verify that all parameters are correct.
  4. Put MODE SELECT into PROGRAM to change etch times.  Note; the program key is 1,2,3,4.  The etcher will step you through the procedure.  Please refer to instructions for details on programming a recipe.
  5. Place MODE SELECT into NORMAL.

 

 

Process Wafer

  1. Push RUN to start the recipe.
  2. Verify gas flows, chamber pressure, DC bias, RF power and hex temp by pushing the appropriate buttons under the display window. 
  3. Silence the alarm at the end of the process by pressing  ALARM SILENCE

Unload Wafers

  1. Push VENT to vent the chamber.
  2. Push ALARM SILENCE to silence the alarm after the tool is vented.
  3. Press the BELL UP buttons to raise the bell jar.
  4. Remove the desired tray and place into the LOADER.
  5. Push the LOADER’s two red buttons to release the wafers. 
  6. Replace device wafers with dummy wafers.
  7. Push the loader buttons and replace the tray.
  8. Verify that the spring loaded tray clips on the top of the hex are flat.
  9. Push the BELL DOWN buttons to close the bell jar.

 

Go to Standby

 

  1. Load recipe # 2 (Standby recipe) by pressing PROCESS SELECT.
  2. Press RUN.

 

 

 

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