Amtetcher Quick Start
Quick starts are a distillation of the more verbose Operating Instructions. The user of the tool should have read and understood the full Operating Instructions for the etcher.
Amtetcher Quick Start
Overview:
- Enable system on BADGER
- Vent the system
- Load wafers
- Select and Verify recipe
- Process wafer
- Unload wafers
- Place system on Standby
- Disable system on CORAL
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Vent:
Initial Condition: Recipe is on Hold
- Press ABORT
- Push VENT to vent the etcher.
- Push ALARM SILENCE to silence the alarm after the tool
is vented.
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Load
Wafers
- Press the BELL UP buttons to raise the bell
jar.
- Inspect the hexode by looking for signs of arcing around
the trays.
- Remove the desired tray and fit into the
LOADER.
- Push the LOADER’s two red buttons to release dummy
wafers.
- Replace dummy wafers with your device or test
wafers.
- Push the loader buttons and replace the
tray.
- Verify that
the spring loaded tray clips on the top of the hex are
flat.
- Push the BELL DOWN buttons to close the bell
jar.
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Select and Verify
Recipe:
- Select the desired recipe by pressing PROCESS
SELECT.
- Put MODE SELECT into REVIEW to look at the recipe.
- Verify that all parameters are
correct.
- Put MODE SELECT into PROGRAM to change etch times. Note; the program key is 1,2,3,4. The etcher will step you through the
procedure. Please refer to instructions
for details on programming a recipe.
- Place MODE SELECT into NORMAL.
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Process
Wafer
- Push RUN to start the recipe.
- Verify gas flows, chamber pressure, DC bias, RF power
and hex temp by pushing the appropriate buttons under the display window.
- Silence the alarm at the end of the process by pressing
ALARM SILENCE
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Unload
Wafers
- Push VENT to vent the chamber.
- Push ALARM SILENCE to silence the alarm after the tool
is vented.
- Press the BELL UP buttons to raise the bell
jar.
- Remove the desired tray and place into the
LOADER.
- Push the LOADER’s two red buttons to release the
wafers.
- Replace device wafers with dummy
wafers.
- Push the loader buttons and replace the
tray.
- Verify that
the spring loaded tray clips on the top of the hex are
flat.
- Push the BELL DOWN buttons to close the bell
jar.
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Go to
Standby
- Load recipe # 2 (Standby recipe) by pressing PROCESS
SELECT.
- Press RUN.
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