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You are here: Home / Equipment / Dry Etching / AMT 8100 Plasma Etcher, amtetcher (semi-clean) / Fine Example of RF arcing

Fine Example of RF arcing

The following pictures show what happens when the trays are not properly latched. Please contact the responsible staff member for more information.



Example of RF arcing


AMTetcher:  burnt insulator after user ran with an improperly installed  tray. This occurred on 3/17/13

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