Drytek2 Quick Start Instructions
Drytek2 Quick Start
OverView: · Enable Drytek2 on BADGER. · Vent the system. · Select and Verify the recipe. · Run a Set-Up (dummy) etch. · Load and Process wafers. · Unload wafers. · Place system on Stand-By. · Disable system on BADGER.
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Vent: Initial Condition: Standby button is lit
1. Press STANDBY to turn it off. 2. System is vented when you can open the chamber door.
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Select and Verify Recipe 3. Turn on RF power supply. 4. Turn on desired gases at the back of the tool. 5. Push the white PROCESS SELECT for the desired recipe. 6. Verify the correct gases have been set to ‘on’ by checking the DIP switches.
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Run a Set-up Etch: 7. Put sufficient time on the thumbwheel switch- at least 10 mins. 8. Push MICRO RESET, then CYCLE START to start the recipe. 9. When recipe has started verify that gas flow, pressure, RF power and tuning is correct. 10. Push CLEAR WAFER to stop the recipe. Push it again to clear CLEAR WAFER.
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Load and Process Wafers 11. Once chamber has vented place wafers on the electrode (s). Be sure they are corralled within the quartz ring. 12. Close and lock the door with the swivel knob. 13. Put etch time on the thumbwheel switch. 14. Push MICRO RESET, then CYCLE START to start the recipe. 15. Monitor parameters during the etch.
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Unload Wafers 16. Once the chamber has vented carefully remove the wafers. 17. Either load more wafers or put the tool into stand-by.
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Go to Standby and Disable 18. Turn off gases in the back of the tool 19. Turn off RF power supply 20. Turn off the white PROCESS SELECT button. 21. Press STANDBY 22. Press MICRO RESET. 23. Press CYCLE START. 24. Disable Drytek2 in badger and fill out data on the logsheet.
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