General Information on Plasma Etching
The following is a detailed overview of all the etchers aat SNF. This list is courtesy of Jim McVittie
This folder contains procedures for attaching samples to carrier wafers in tools that require full wafer sizes. Pros and cons of each method are given. It should be noted that materials allowed in etch systems may not be allowed in depositions system. This is due to issues such as out-gassing (hazing of the deposited film) of the material or temperature of the system. Specific tool recommendations will be given.
Link to common tool issues and solutions: SNF Etch Equipment How To's and FAQ's