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General Information on Plasma Etching

In this folder you will find general information about plasma etching at SNF. Topics included are; description of plasma etch systems available, how plasma etching works, tips and tricks, using non-standard sample sizes, etc.

Overview of Etchers Available at SNF

The following is a detailed overview of all the etchers aat SNF. This list is courtesy of Jim McVittie

Overview of Etchers Available at SNF - Read More…

How to Attach Samples to Carrier Wafers for Plasma Etching or Deposition

This folder contains procedures for attaching samples to carrier wafers in tools that require full wafer sizes. Pros and cons of each method are given. It should be noted that materials allowed in etch systems may not be allowed in depositions system. This is due to issues such as out-gassing (hazing of the deposited film) of the material or temperature of the system. Specific tool recommendations will be given.

How to Attach Samples to Carrier Wafers for Plasma Etching or Deposition - Read More…

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