How to Attach Samples to Carrier Wafers for Plasma Etching or Deposition
Kapton tape, a commercial polyimide tape commonly found in the lab, can be used to attach pieces to a carrier wafer.
Photoresist can be used to attach pieces to a carrier wafer. The commonly available resist in the lab may be used, 3612, SPR22-3 or -7. PMMA may also be used but it is described in another procedure page.
This page describes two methods of using PMMA to attach samples to carrier wafers. A Wet Mounting procedure and a Heated Mounting procedure. These procedures are courtesy of labmembers Jim Kruger and Jan Petykiewicz.
Within is a description the the procedure using carbon dots or tape to attach small samples onto full wafers for etch or deposition in tools that require whole wafers. Included are hints and tips for greater success.
This page describes the procedure for attaching smaller samples to larger of full wafer size carrier wafers.
Here is a list of prohibited materials used in other labs or facilities that have been tried in SNF but rejected as not compatible with tools and processes. They are presented as informational only.