Lam Research 9400 TCP Poly Etcher, lampoly (clean)
The Lam Research TCP9400 is a single wafer, low pressure, high density plasma etcher for polysilicon processing.
Clarycon is a non-commercial entity which is an excellent technical resource for plasma etching technologies, especially with respect to HBr/Cl2 chemistries.
Deep etch Lampoly profiles in silicon crystal silicon, using an oxide hard mask, recipe 1. Good illustration of the loading effect (etch rate variation with feature size) and also how the loading effect influences the shape at the base of the etched feature.
Lampoly is frequently used for shallow, anisotropic etching of poly and single-crystal silicon. Here, we present a recipe for isotropic etching of these materials based on SF6/Cl2 chemistry.
Semiclean wafers can be etched on lampoly and the poly chamber of p5000etch, with these restrictions.
Profiles showing anisotropic etching in Lampoly using standard recipe #1.