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You are here: Home / Equipment / Dry Etching / Lam Research 9400 TCP Poly Etcher, lampoly (clean) / Semiclean Wafers on lampoly/p5000etch Poly

Semiclean Wafers on lampoly/p5000etch Poly

Semiclean wafers can be etched on lampoly and the poly chamber of p5000etch, with these restrictions.

Microsoft Word Document icon SemicleanPolyetch.doc — Microsoft Word Document, 24 kB (25088 bytes)

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