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Matrix Plasma Asher, matrix (contaminated)

Matrix Plasma Asher, matrix

The Matrix plasma asher is used to strip photoresist from contaminated wafers using a combination of oxygen plasma, high power, higher pressure and a heated chuck (platen).

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Temporary Quick Start for Matrix

The matrix has recently undergone a major software upgrade. This quick start is offered as a stop-gap so that labmembers can use the tool as more detailed operating instructions are written.

Temporary Quick Start for Matrix - Read More…

Cr in matrix

Be aware that Cr can be etched in the matrix.

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