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Oxford III-V Etcher

The Oxford Instruments PlasmaPro System 100 Cobra III-V Etcher was acquired in late 2011 for precision etching of III-V compounds. It is currently approved to etch GaAs, InGaAs, InAs, InP, InGaAsP, and GaP only. Please contact Jim McVittie ( for approval to etch other substrates.

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