PlasmaTherm - Creating/ Editing Recipes
Some of the chosen parameters have options that are not obvious to users new to the PlasmaTherms. This is especially true for the RF power and tuning system. Listed are definitions of the options. Special thanks to Jim McVittie for these descriptions.
This summary of how to create a recipe from an existing recipe is provided by Process Engineer Christel Munoz of Plasma Therm. It goes through the various steps needed to customize a recipe. Please also review the SNF Plasma Therm sequence and recipe naming convention guidelines prior to creating new files.