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PlasmaTherm - Creating/ Editing Recipes

Procedure to create, edit and modify recipes for PT-MTL, PT-OX, PT-DSE and hdpcvd. In order to minimize recipe errors and better maintain equipment health, recipes need to go through an approval process before creation & use. Please consult responsible staff for approval.

Definition of Terms Used in Process Steps

Some of the chosen parameters have options that are not obvious to users new to the PlasmaTherms. This is especially true for the RF power and tuning system. Listed are definitions of the options. Special thanks to Jim McVittie for these descriptions.

Definition of Terms Used in Process Steps - Read More…

Creating a New Recipe from an Existing Recipe

This summary of how to create a recipe from an existing recipe is provided by Process Engineer Christel Munoz of Plasma Therm. It goes through the various steps needed to customize a recipe. Please also review the SNF Plasma Therm sequence and recipe naming convention guidelines prior to creating new files.

Creating a New Recipe from an Existing Recipe - Read More…

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