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Creating a New Recipe from an Existing Recipe

This summary of how to create a recipe from an existing recipe is provided by Process Engineer Christel Munoz of Plasma Therm. It goes through the various steps needed to customize a recipe. Please also review the SNF Plasma Therm sequence and recipe naming convention guidelines prior to creating new files.

How to Create a New Recipe Based on an Existing Recipe:

 

  1.  On the Editors page, click on the Sequence Editor tab.
  2. Click Load and select the “PRmask TiW Etch 1” recipe.
  3. Click Save As and type in the new recipe name in the pop-up window.  Please review the sequence and recipe naming convention information prior to creating new recipes and sequences.  <add link here?>
  4. On the bottom right of the screen, there will be a panel listing both recipes. Click on the “PRmask TiW Etch 1” recipe and then click Close.
  5. Click on the new recipe name to select it, which loads all of the steps on the screen.
  6. On the first step name, left click and then click Edit All Steps From This Step.
  7. The Step Editor tab should now open, with all of the steps listed in the panel on the bottom right of the screen.
  8. Select the first step name (example: Etch 1 Stabilize) and click Save As. Enter the new step name (example: Etch 2 Stabilize) and click ok.
  9. The new step will appear at the bottom of the list in the panel on the bottom right of the screen.
  10. Click on the old step name and click Close.
  11. Repeat for all of the steps in the recipe.
  12. Click Close All to close all of the new steps.
  13. Select the Sequence Editor tab to display the new recipe.
  14. On the first step in the recipe, left click on the step name (example: Etch 1 Stabilize) and then select Replace This Step.
  15. Select the new step name you made based on the old step name (example: Etch 2 Stabilize).
  16. The new step name should appear above the step parameters.
  17.  Repeat for all steps in the recipe (replace all stabilize steps with stabilize steps, ignite steps with ignite steps, etc.)
  18. Click Save after all the steps have been switched out. You now have a unique set of steps that are specific to your new recipe. If changes are made to the old steps, they will not carry over to your new recipe unless the same step is used in both recipes.
  19. And finally, all the new steps must be updated for different parameters (powers, gas flow, pressure, temps, etc.)
  20. IIf only one step needs to be edited, left click on that step name and select Edit This Step. If more than one step needs to be edited, you can select each individually or use the Edit All Steps Up To This Step or Edit All Steps From This Step.
  21. The Step Editor tab will open and list the open steps in the panel at the bottom right.
  22. Make changes in the first parameter column and hit enter or tab to make sure the change is accepted. Once the change is accepted, the Save button is now available. Save the step and close it. Repeat for each step that needs editing.
  23. The changes in the Step Editor are automatically applied to the recipe after the step is saved. To verify, click on the Sequence Editor tab and review your recipe. If everything is correct, you are now ready to run the recipe.

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