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PlasmaTherm - Creating/ Editing Recipes

 

PlasmaTherm Etchers - Creating/ Editing Recipes

 Note:  A process sequence is a recipe that is made up of several process steps. It gives information like gases, min/max flows, set points for RF, etc. Be warned that once you change a value in a process steps that value will be changed for all the steps with the same name. To be safe, if you copy a step be sure to give it a unique name.

Using the Editors Menu

 The editors menu allows you to create, edit or delete steps or sequences of steps.  Use the Editors button on the Menu Panel to get into the editors menu.

The following screens are available;

  • Step Editor- create, edit or delete process steps
  • Sequence Editor- to assemble process steps to create, edit or delete an existing process sequence
  • Loop Editor- select a process sequence to be repeated
  • Import/Export- transfer process step or sequence files from one directory to another
  • Upload/Download between the CTC and the host.  This is not available as this tool does not have a host.

Step Editor

 The step editor allows the user to create new process steps, edit or delete existing steps and close process steps when editing is complete.  In a process step the user can edit the setpoints, error and warning limits of parameters associated with the step.

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Command button
Significance 
New Create a new process step with default values
Load Select a process step from the list of existing steps to be loaded
Save Save the selected process step to the hard drive.  Uses current name, if there is one, otherwise prompts for a new name
Save as...
Save the selected process step to the hard drive, prompts for name
Close Close and remove the process step which is highlighted in the Open Steps field
Delete Delete the selected process step from the hard drive
Cancel Edits
Undo all changes to all open steps since their last save
Close All
Close and remove all steps
Print to File
Save the process step shown in the table in a file.  A window will open when the action  has been completed.  The file is named <RecipeParameters.txt>.  The step is stored in ASCII format and can be opened with any text editor.  You can also load the date into a spreadsheet program for further evaluation.  (check to see if this is true of the SNF tool)

Open Steps

Several process steps can be loaded in succession.  The names of the steps currently loaded are listed in the Open Steps field in the lower right corner of the screen.


Parameter Value

The parameter values of the steps currently highlighted in the Open Step fiels are displayed on the screen.  Only parameters values relating to the module currently in focus will be displayed.  If not step is highlighted the list will show all possible parameters for the current module.
You can edit the value by clicking on the set points cell associated with the parameter, entering a new setpoint , or selecting and pressing the Enter or Tab key.


Error and Warning Limits
  • Hard Tolerance: this is a value, when reached, that will cause an error alarm to be posted that will stop the process.
  • Soft Tolerance;:If this value is reached a warning alarm will be posted but the process will not be stopped. 

Default Process Steps


Default process steps may be found in the information for a specific Plasma Therm tool, for ex. PT-Ox.  Please note that they are specific to each etcher or deposition tool.  They list parameters like gases, max flows, RF power, etc...
 

Creating a New Process Step

  1. Click on the New button on the right side of the screen.
  2. Edit the parameters (Setpoint, Soft Tolerance, Hard Tolerance) by clicking on the respective fields on the table.  'Modified' will appear at the top of the table until it is saved.
  3. Save the edited process step by clicking on Save As... and entering the process name.
Another way of creating a new step is to load an existing step.  Edit the parameters and use Save As... under a new name.

Modifying a Process Step

  1. Load the step by clicking on the Load button and selecting a step from the list.
  2. Edit the parameters (Setpoint, Soft Tolerance, Hard Tolerance) by clicking and editing the respective fields in the table.
  3. 'Modified' will appear at the top of the table until the parameter changes have been saved.
  4. Save the edited process step by clicking Save.

NOTE- Important!!

  1. Any changes made to a process step will appear in all process sequences that use that step.  Re-name steps you don't want repeated in each sequence.
  2. Jobs that have been started before the process step changes will still contain the old parameter information and values.


Sequence Editor

 Select the Sequence Editor from the options presented from the Editors command button.  The sequence editor is used to;

  • Combine process steps
  • Create new process sequences
  • Edit existing process sequences
  • Delete process sequences no longer needed


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This screen consists of two pages, Setpoints and Tolerances.  Select the desired page using the drop down box.  The Setpoint page displays the setpoints for each parameter in each combined process step.  The Tolerance page also displays the setpoints in addition to the Soft and Hard Tolerances.
The list shows the parameter values for the sequence that has been selected in teh Open Sequenceses field on the right side of the screen.  Process steps that have been created in the process step editor can be inserted into the table as a column.
Multiple sequences may be loaded and their names will be displayed in the Open Sequence field.


Command button
Significance 
New Create a new process sequence without any associated steps. 
Load Select a process sequence from the list of existing sequences for viewing or editing purposes.
Save Save the selected process sequence to the hard drive under current name. 
Save as...
Save the selected process sequence under a new name to the hard drive.
Close Close and remove the process sequence and remove it from the buffer.
Delete Delete the selected process sequence from the hard drive
Cancel Edits
Undo all changes to all open sequences since their last save
Close All
Close and remove all sequences
Print to File
Save the data shown in the table in a file.  A window will open when the action  has been completed.  The file is named <RecipeParameters.txt>.  The step is stored in ASCII format and can be opened with any text editor.  You can also load the date into a spreadsheet program for further evaluation.  (check to see if this is true of the SNF tool)


Creating a New Process Sequence- (to combine individual  process steps into a process sequence)

  1. Click on the New button on the right side of the screen.
  2. In the first column click the headline with the number one.  This opens up a popup menu.
  3. Click on Insert New Step.  At release you'll get a a window that allows you to chose Insert New Step.  Repeat until all the steps have been added.
  4. Save the edited process step by clicking on Save As... and enter the name of the new process sequence.
  5. Ok will put the process sequence in the Sequence Name field.


Modifying a Process Sequence

  1. Load the step by clicking on the Load button and selecting a sequence from the list.
  2. Click and hold on the cell at the head of the process strep you want to edit.  A pull down menu will allow you to pick a command.  For Replacing or Inserting step a window will open to let you select a new step.  In the case of Removing a step the action happens immediately.
  3. The message 'Modified' will appear above the table.
  4. Use the Cancel Edits button to undo changes.  Otherwise click on the Save button to save the modified process sequence.
Command Button
Significance
Replace Step
Replace the current process step by selecting the new step from the Replace With Which Step popup window
Insert Step
Insert the newly selected process step before the current one by selecting the new step from the Insert Which Step popup window
Remove This Step
Delete the selected process step from the current process sequence



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Using Loops

 The Loop Editor is used to define re-occurring process steps and process parameter morphing.

 

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Looping allows a portion a process recipe (sequence) to be executed for a multiple number of iterations.  This is called Process Looping.  This feature enables a process recipe, which uses a number of repeated steps, to be written in a simplified code (fewer steps).  Also, looping enables processing (etch or deposition) of a substrate to take place in small concise increments.

You may terminate a loop sequence by;
  • Number of iterations
  • Time
  • Endpoint detection


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To define  process step loop;
  1. In the Stored Recipes field select the process sequence containing the step to be looped
  2. The selected step is displayed in the Loop tab folder
  3. Define the stop condition in the Loop Termination field.
  4. Repeat steps1...3 to define further process step loops for the process sequence.
  5. Click Save to save the step loops in the active process sequence.


About Morphing

 

Morphing enables to vary process parameter/s systematically with loop count between the begin and end values. The slope or rate of change with loop count is controlled by "interpolation".  A number of curves are stored int eh software and the curve can be chosen by the corresponding numerical value for the interpolation parameter.

To set a morphing parameter:

1. Select desired the process sequence from the list in the "Stored Recipes" field.

2. Select the process step of interest from the "recipe steps" field.

3.  List of parameters for which morphing curve can be applied are displayed under the "morphing" tab.  

4. Enter the start and end set points and the curve number for the morphing parameter for each of the parameter for which morphing is required.

5. Click "save" to save the recipe.

 Morphing_screen

 

 

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