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Selected Recipes for PT-DSE

The folder contains some recipes commonly used int eh PlamaTherm Deep Silicon Etcher.

Process Sequence Template for PT-DSE

This template may be used to create or copy recipes for PT-DSE.

Process Sequence Template for PT-DSE - Read More…

DSE (FAT) Field Acceptance Test

This recipe was used for the factory and field acceptance test at SNF. It is used commonly as the basis for other recipe writing. It is also used as the monitor recipe for the tool qual.

DSE (FAT) Field Acceptance Test - Read More…

Nano Recipe

This recipe is used for shallower etches and smoother scallops.

Nano Recipe - Read More…

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