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DSE (FAT) Field Acceptance Test

This recipe was used for the factory and field acceptance test at SNF. It is used commonly as the basis for other recipe writing. It is also used as the monitor recipe for the tool qual.

 

DSE FAT

 

Parameter
1: DSE FAT
Stabilize
2: DSE FAT
 Light
3: DSE FAT
Dep
4: DSE FAT
Etch A
5: DSE FAT
Etch B
5: DSE FAT
Pump


Process Time
20
6
2.5
1.5
3
5


Over Etch Time Percent
0
0
0
0
0
0


Pressure/Position Evacuation Condition

#pressure

#pressure #pressure #pressure #pressure #position


Pressure 10.0
10.0 25.0 40.0 75.0
0


Throttle Valve Position Set Point
0
0
17.0
18.0
0
100.0


Process End Condition
#Time
#Time #Time #Time #Time #Time

Recipe Restart Sequence Name








Recipe Abort Sequence Name







C4F8 75
75
150
150
150
0


SF6 150
150
150
150
300
0


Ar 30
30
30
30
30
0


O2 0
0
0
0
0
0


Gas1 Dump Valve Direction
#To PM
#To PM #To PM #To pump
#To pump #To PM

Gas2 Dump Valve Direction #To pump #To pump #To pump #To PM #To PM #To PM

He Cooler Mode
#pressure #pressure #pressure #pressure #pressure #pressure

He Cooler Pressure Setpoint
4000.0
4000.0 4000.0 4000.0 4000.0 4000.0

He Cooler Flow Setpoint 0
0
0
0
0
0


Bias RF Forward Setpoint
0
500
10
250
10
0


Bias WaveformSetpoint
1
1
1
1
1
1


IPC Forward Power Setpoint
0
1500
2000
2000
3000
0


IPC Match Control Mode
#default
#Auto
#Hold
#Hold #Hold #Auto

IPC Match Load Position
0
0
0
0
0
0


IPC Match Tune Position 0
0
0
0
0
0


Temperature Electrode Setpoint
15
15 15 15 15 15

Temperature Lid Setpoint 150
150 150 150 150 150

Temperature Liner Setpoint 70
70 70 70 70 70

Temperature Spool Setpoint 180
180 180 180 180 180

Execute if later Step Restarted
false
false false false false false

External Detector Endpoint Recipe Name
#None
#None #None #None #None #None

Throttle Valve Overshoot Hold Time
0
0
0
0
0
0


Throttle Valve Overshoot 0
0
0
0
0
0


No Endpoint found alarm severity
#Error #Error #Error #Error #Error #Error

 IPC RF Reflected Power Error Timeout
10000
10000 10000 10000 10000 10000

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