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Process Sequence Template for PT-DSE

This template may be used to create or copy recipes for PT-DSE.

 

Recipe Template- PT-DSE

 

Parameter
Step 1
Step2
Step 3
Step 4
Step 5
Step 6
Step 7
Step 8
Process Time








Over Etch Time Percent








Pressure/Position Evacuation Condition









Pressure







Throttle Valve Position Set Point








Process End Condition








Recipe Restart Sequence Name








Recipe Abort Sequence Name







C4F8







SF6







Ar







O2







Gas1 Dump Valve Direction








Gas2 Dump Valve Direction







He Cooler Mode








He Cooler Pressure Setpoint








He Cooler Flow Setpoint







Bias RF Forward Setpoint








Bias WaveformSetpoint








IPC Forward Power Setpoint








IPC Match Control Mode








IPC Match Load Position








IPC Match Tune Position







Temperature Electrode Setpoint








Temperature Lid Setpoint







Temperature Liner Setpoint







Temperature Spool Setpoint







Execute if later Step Restarted








External Detector Endpoint Recipe Name








Throttle Valve Overshoot Hold Time








Throttle Valve Overshoot







No Endpoint found alarm severity








 IPC RF Reflected Power Error Timeout








 

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