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You are here: Home / Equipment / Dry Etching / Plasmatherm Etchers (pt-dse, pt-ox and pt-mtl) / PlasmaTherm Deep Silicon Etcher (pt-dse) / Shallow Silicon Etch Recipe Development Efforts

Shallow Silicon Etch Recipe Development Efforts

The DSE can be used to etch shallow trenches or thin poly/amorphus Si structures. The profile and sidewall result can be an issue depending on customer needs.

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