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You are here: Home / Equipment / Dry Etching / Plasmatherm Etchers (pt-dse, pt-ox and pt-mtl) / PlasmaTherm Deep Silicon Etcher (pt-dse) / Shallow Silicon Etch Recipe Development Efforts / Silicon etch for 1 um thick Amorphous Polysilicon over oxide structures.
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Silicon etch for 1 um thick Amorphous Polysilicon over oxide structures.

File provide by Kimberly Harrison. Many thanks to her for her support and Justin Snapp's execution.

PDF document icon 05_14_13 Etch Update.pdf — PDF document, 1810 kB (1854011 bytes)

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