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PlasmaTherm Metal Etcher (pt-mtl)

The Versaline LL-ICP Metal Etcher was acquired in late 2011 for precision metal etching on a flexible range of substrate types. It is undergoing installation now and should be available for use some time this summer.

Equipment Description and Operating Instructions for Plasma Therm Metal Etcher (pt-mtl)

PT-MTL is an ICP (Inductively Coupled Plasma) etch system configured for metal etching. It is a single wafer etcher with a load lock. The equipment can be configured to etch either a 4” or a 6” wafer. Thanks to superuser Usha Raghuram for these instructions.

Equipment Description and Operating Instructions for Plasma Therm Metal Etcher (pt-mtl) - Read More…

Recent Qual Results

This page contains the results from recent quals. Quals are run on a routine basis, when a puzzling problem is reported or when major repairs have been performed on the tool.

Recent Qual Results - Read More…

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