PlasmaTherm Metal Etcher (pt-mtl)
PT-MTL is an ICP (Inductively Coupled Plasma) etch system configured for metal etching. It is a single wafer etcher with a load lock. The equipment can be configured to etch either a 4” or a 6” wafer. Thanks to superuser Usha Raghuram for these instructions.
This page contains the results from recent quals. Quals are run on a routine basis, when a puzzling problem is reported or when major repairs have been performed on the tool.