PlasmaTherm Metal Etcher (pt-mtl)
Additional information specific to PT-MTL is given in this section.
Process steps are added together to create process sequences for Versaline tools. This process step is the default step specific to the PT-MTL (Metal Etch) tool. It lists all the parameters and their limits to be used in recipe writing.
This page contains the results from recent quals. Quals are run periodically, when a puzzling problem is reported or when major repairs have been performed on the tool.
This folder contains reports from EE412, various studies and interested labmembers.