Recipes for Plasma Therm Metal Etcher (pt-mtl)
This page contains a copy of the recipe Al-HiPRSel-Usha which is used for the qualification on the tool. More notes on qual results can be found in the information and operating instructions for PT-MTL.
This template may be used to record or document recipes (Process Sequences) for the PT-MTL etcher.
This is an O2 clean recipe to be used before critical etches or running the quals on the tool.