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SNF Supplied Patterned Wafer Resist Thickness Data

Wafer Position  Run 9 PR Thickness (μm)  Run 12 PR Thickness (μm)  Run 13 PR Thickness (μm)  Run 14 PR Thickness (μm) 
Top  1.582 1.63 1.63 1.648
Top Middle  1.574 1.612 1.62 1.623
Middle  1.564 1.608 1.61 1.635
Bottom Middle  1.549 1.584 1.595 1.621
Bottom  1.537 1.581 1.597 1.625
Left  1.584 1.621 1.614 1.624
Left Middle  1.569 1.614 1.612 1.617
Right Middle  1.567 1.609 1.625 1.631
Right  1.587 1.619 1.637 1.628

 

 

  • All wafers had edge bead removed to prevent sticking to mechanical clamp    

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