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EE412 Reports

Links to EE412 reports are found on this page.

 

Areas of Interest
Project Name
Primary Lab Tools Used Researchers and (Mentors)
Date
PECVD SiNx stress, Nanosphere etching
SiNx PECVD and Nanostructure Etching Recipe Development
CCP PECVD
STSDEP
PT-Ox
Yusi Chen and Muyu Xue
(Jim McVittie)
(Jim Harris)
6/2014

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