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You are here: Home / Equipment / Dry Etching / Plasmatherm Etchers (pt-dse, pt-ox and pt-mtl) / PlasmaTherm Oxide Etcher (pt-ox) / Process Step for Plasma-Therm Deep Dielectric Etch System (pt-ox)

Process Step for Plasma-Therm Deep Dielectric Etch System (pt-ox)

Process steps are added together to create process sequences for Versaline tools. This process step the default step specific to the PT-OX (Deep Dielectric Etch) tool. It lists all the parameters and their limits to be used in recipe writing.

 

Default Process Step for Plasma-Therm Deep Dielectric Etch System

 Please note: the minimum ICP Forward pressure noted here is different from what is in the software for the tool.  This is at the suggestion Process Engineering at PlasmaTherm.  Using lower than the suggested minimum setpoint will cause dangerously high spiking reflected power.

 

Parameter
Set Point
Soft Tolerance

Hard Tolerance

Min
Max
Units
Process Time
10.0 0 +/-
0 +/- 0 1.0e6 s
Over Etch Time Percent
0
10 % 20 % 0 100 %
Pressure/Position Evacuation Condition
#pressure
#position
- - - - - - -
Pressure 10.0 5 +/- 10 +/- 0 100 mTorr
Throttle Valve Position Set Point
0 10 % 20 % 0 100 %
Process End Condition
#Time
#Endpoint
- - - - - - -
Recipe Restart Sequence Name
All Process Sequences Names
- - - - - - -
Recipe Abort Sequence Name All Process Sequences Names - - - - - - -
C4F8
0 4.0
+/- 10.0
+/- 0 201.8
sccm
H2
0 2.0
+/- 5.0 +/- 0 98.4
sccm
AR
0 2.0 +/- 5.0
+/- 0 97.3
sccm
CF4
0 2.0 +/- 5.0 +/- 0 102.1
sccm
O2 0
2.0
 +/- 5.0 +/- 0  95.4  sccm
CHF3 0 2.0
 +/- 5.0  +/- 0  103.5  sccm
 He 0 2.0
+/- 5.0 +/- 0  97.8 sccm
 N2 0 4.0
+/-  10.0 +/- 0  191.8 sccm
He Cooler Mode
#pressure
#flow
- - - - - - -
He Cooler Pressure Setpoint
0 10 % 20 % 0 10000 mTorr
He Cooler Flow Setpoint 0 10 % 20 % 0 10.0 sccm
Bias RF Forward Setpoint
0 10
% 20
% 0 600.0 W
IPC Forward Power Setpoint
0
10 % 20 % 400
3500 W
 Bias Match Control Mode  #auto
#man->auto
#manual
#hold
#default
 -  -  -  -  -  -  -
 Bias Match Load Position  0  10 %  20  %  0  100.0  %
 Bias Match Tune Position  0  10 %  20  %  0  100.0  %
IPC Match Control Mode
#auto
#man->auto
#manual
#hold
#default
- - - - - - -
IPC Match Load Position
0 10 % 20 % 0 100.0 %
IPC Match Tune Position 0 10 % 20 % 0 100.0 %
Temperature Electrode Setpoint
25 5 +/- 10 +/- -40.0 40.0 C
Temperature Lid Setpoint 25 25 +/- 50 +/- 20.0 180.0 C
Temperature Spool Setpoint 25 25 +/- 50 +/- 20.0 180.0 C
Execute if later Step Restarted
False - - - - - - -
External Detector Endpoint Recipe Name
#none
#test.ewr
- - - - - - -
No Endpoint found alarm severity
#error
#warning
#none
-  - - - - - -
 Camera Mode Setpoint
 #none
#manual
 -  -  -  -  -  -  -
 Bias RF Power Error Timeout
 10000  0  %  0  %  0  60000  ms
 IPC RF Reflected Power Error Timeout
 10000  0  %  0  %  0  60000  ms
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