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5PT-Ox Monitor Recipe- OX_ER_TEST

This recipe is used as a routine monitor for tool performance.

 

OX_ER_TEST

 

Parameter
1:OX_ER_TEST_
Gas Stab
2:OX_ER_TEST_
lgh
3:OX_ER_TEST_
Main Etch





Process Time
30
5
60





Over Etch Time Percent
0
0
0





Pressure/Position Evacuation Condition
#pressure
#pressure #pressure




Pressure 5.0
5.0
5.0





Throttle Valve Position Set Point
100.0
100.0
100.0





Process End Condition
#time
#time #time




Recipe Restart Sequence Name








Recipe Abort Sequence Name







C4F8
0
0
0





H2
0
0
0





AR
0
0
0





CF4
0
0
0





O2 2
2 2





CHF3 45
45
45





 He 0
0
0





 N2 0
0
0





He Cooler Mode
#pressure #pressure #pressure




He Cooler Pressure Setpoint
4000.0
4000.0
4000.0





He Cooler Flow Setpoint 0
0
0





Bias RF Forward Setpoint
0
50
50





IPC Forward Power Setpoint
0
600
600





 Bias Match Control Mode #Manual
#auto
#auto




 Bias Match Load Position 21 0
0





 Bias Match Tune Position 74 0
0





IPC Match Control Mode
#Manual #auto #auto




IPC Match Load Position
70 0
0





IPC Match Tune Position 51
0
0





Temperature Electrode Setpoint
10
10
10





Temperature Lid Setpoint 90
90
90





Temperature Liner Setpoint 70
70
70





 Temperature Spool Setpoint  90  90  90          
Execute if later Step Restarted
#false
#false #false




External Detector Endpoint Recipe Name
#none
#none #none




No Endpoint found alarm severity
#error
#error #error




 Camera Mode Setpoint
#none #none #none




 Bias RF Power Error Timeout
10000.0
10000.0 10000.0




 IPC RF Reflected Power Error Timeout
10000.0 10000.0 10000.0




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