Recipes for Plasma Therm Dielectric Etcher (pt-ox)
This template may be used for the creation of recipes or to keep a record of existing recipes. It is strongly suggested that users maintain copies of the full recipes they are using.
The seO2 Clean-1 recipe is used to clean polymer from the chamber. It is suggested that users of the etcher run the recipe between each etch.
This recipe is used as a routine monitor for tool performance.