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You are here: Home / Equipment / Dry Etching / Plasmatherm Etchers (pt-dse, pt-ox and pt-mtl) / Selected Suggested Recipes / Recipes for Plasma Therm Dielectric Etcher (pt-ox)

Recipes for Plasma Therm Dielectric Etcher (pt-ox)

Suggested recipes for the etcher are located here.

Process Sequence Template for PT-OX

This template may be used for the creation of recipes or to keep a record of existing recipes. It is strongly suggested that users maintain copies of the full recipes they are using.

Process Sequence Template for PT-OX - Read More…

seO2 Clean-1 Recipe

The seO2 Clean-1 recipe is used to clean polymer from the chamber. It is suggested that users of the etcher run the recipe between each etch.

seO2 Clean-1 Recipe - Read More…

5PT-Ox Monitor Recipe- jkPRmaskOxSTD

This recipe is used as a routine monitor for tool performance.

5PT-Ox Monitor Recipe- jkPRmaskOxSTD - Read More…

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