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Process Sequence Template for PT-OX

This template may be used for the creation of recipes or to keep a record of existing recipes. It is strongly suggested that users maintain copies of the full recipes they are using.

 

Process Sequence Template for PT-OX

 

 

Parameter
Step 1
Step2
Step3
Step4
Step5
Step6
Step7
Step8
Process Time








Over Etch Time Percent








Pressure/Position Evacuation Condition








Pressure







Throttle Valve Position Set Point








Process End Condition








Recipe Restart Sequence Name








Recipe Abort Sequence Name







C4F8








H2








AR








CF4








O2







CHF3







 He







 N2







He Cooler Mode








He Cooler Pressure Setpoint








He Cooler Flow Setpoint







Bias RF Forward Setpoint








IPC Forward Power Setpoint








 Bias Match Control Mode







 Bias Match Load Position







 Bias Match Tune Position







IPC Match Control Mode








IPC Match Load Position








IPC Match Tune Position







Temperature Electrode Setpoint








Temperature Lid Setpoint







Temperature Liner Setpoint







 Temperature Spool Setpoint                
Execute if later Step Restarted








External Detector Endpoint Recipe Name








No Endpoint found alarm severity








 Camera Mode Setpoint








 Bias RF Power Error Timeout








 IPC RF Reflected Power Error Timeout








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