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You are here: Home / Equipment / Dry Etching / Plasmatherm Etchers (pt-dse, pt-ox and pt-mtl) / Selected Suggested Recipes / Recipes for Plasma Therm Metal Etcher (pt-mtl)

Recipes for Plasma Therm Metal Etcher (pt-mtl)

Al-HiPRSel-Usha

This page contains a copy of the recipe Al-HiPRSel-Usha which is used for the qualification on the tool. More notes on qual results can be found in the information and operating instructions for PT-MTL.

Al-HiPRSel-Usha - Read More…

Process Sequence Template for PT-MTL

This template may be used to record or document recipes (Process Sequences) for the PT-MTL etcher.

Process Sequence Template for PT-MTL - Read More…

O2 Clean 1

This is an O2 clean recipe to be used before critical etches or running the quals on the tool.

O2 Clean 1 - Read More…

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