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Al-HiPRSel-Usha

This page contains a copy of the recipe Al-HiPRSel-Usha which is used for the qualification on the tool. More notes on qual results can be found in the information and operating instructions for PT-MTL.

 

 

Parameter
1:Al-HS-GSA-Usha
2:Al-HS-L1a-Usha 3:Al-HS-L2a-Usha 4:Al-HS-Ma-Usha 5:Al-HS-Na-Usha5



Process Time
10.0
3.0
3.0
75 (varied)
90



Over Etch Time Percent
0
0
0
0
0



Pressure/Position Evacuation Condition
#pressure
#pressure #pressure #pressure #pressure


Pressure 10.0
10.0
10.0
7.0
10.0



Throttle Valve Position Set Point
0
0
0
0
0



Process End Condition
#Time
#Time #Time #Time #Time


Recipe Restart Sequence Name








Recipe Abort Sequence Name







Cl2
50.0
50.0
50.0
70.0
0



BCl3
50.0
50.0
50.0
20.0
0



O2
0
0
0
0




SF6
0
0
0
0
0



Ar
0
0
 0 0
0


 
CF4 0
0
 0 0
 0


CH4
0
0
0
0
0



N2 10.0
10.0
10.0
 10.0 40.0



He Cooler Mode
#pressure
#pressure #pressure #pressure #pressure


He Cooler Pressure Setpoint
4000.0
4000.0 4000.0 4000.0 4000.0


He Cooler Flow Setpoint 0
0
0
0
0



Bias RF Forward Setpoint
0
200.0
200.0
150.0
0



IPC Forward Power Setpoint
0
0
1000.0
1000.0
500.0



 Bias Match Control Mode  #manual
 #auto  #auto  #auto  #auto      
 Bias Match Load Position  55  0 0
 0  0      
 Bias Match Tune Position  60  0 0
 0  0      
IPC Match Control Mode
 #manual  #manual  #auto  #auto  #auto


IPC Match Load Position
30.0
30.0
0
0
0



IPC Match Tune Position 60.0
60.0
0
0
0



Temperature Electrode Setpoint
20
20
20
20
20



Temperature Lid Setpoint 90
90
90
90
90



 Temperature Liner Setpoint
 70  70  70  70  70      
Temperature Spool Setpoint 90
90
90
90
90



Execute if later Step Restarted
false
false false false false


External Detector Endpoint Recipe Name
#none
#none #'Al_usha.ewr'
#none #none


No Endpoint found alarm severity
#error
#error  #error #error #error


 Camera Mode Setpoint
#none
 #none  #none  #none  #none      
 Bias RF Power Error Timeout
10000
 10000  10000  10000  10000  
 
 IPC RF Reflected Power Error Timeout
 10000  10000  10000  10000  10000      

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