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Process Sequence Template for PT-MTL

This template may be used to record or document recipes (Process Sequences) for the PT-MTL etcher.

Template for Process Sequences for PT-MTL

 

Parameter
Step1
Step2
Step3
Step4
Step5
Step6
Step7
Step8
Process Time








Over Etch Time Percent








Pressure/Position Evacuation Condition








Pressure







Throttle Valve Position Set Point








Process End Condition








Recipe Restart Sequence Name








Recipe Abort Sequence Name







Cl2








BCl3








O2








SF6








Ar


 



 
CF4

 
 


CH4








N2


 



He Cooler Mode








He Cooler Pressure Setpoint








He Cooler Flow Setpoint







Bias RF Forward Setpoint








IPC Forward Power Setpoint








 Bias Match Control Mode  
             
 Bias Match Load Position    
         
 Bias Match Tune Position    
         
IPC Match Control Mode








IPC Match Load Position








IPC Match Tune Position







Temperature Electrode Setpoint








Temperature Lid Setpoint







 Temperature Liner Setpoint
               
Temperature Spool Setpoint







Execute if later Step Restarted








External Detector Endpoint Recipe Name








No Endpoint found alarm severity


 




 Camera Mode Setpoint

             
 Bias RF Power Error Timeout

         
 
 IPC RF Reflected Power Error Timeout
               

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