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You are here: Home / Equipment / Dry Etching / Plasmatherm Etchers (pt-dse, pt-ox and pt-mtl) / Typical Plasma Therm Versaline Process Sequence Steps / Process Step for Plasma-Therm DSE (Deep Silicon Etch) System

Process Step for Plasma-Therm DSE (Deep Silicon Etch) System

Process steps are added together to create process sequences for Versaline tools. This process step is specific to the DSE tool. It lists all the parameters and their limits to be used in recipe writing.

Default Process Step for Plasma-Therm Versaline Deep Silicon Etch tool

 Please note: the minimum ICP Forward pressure noted here is different from what is in the software for the tool.  This is at the suggestion Process Engineering at PlasmaTherm.  Using lower than the suggested minimum setpoint will cause dangerously high spiking reflected power.

 

Parameter
Set Point
Soft Tolerance

Hard Tolerance

Min
Max
Units
Process Time
10.0 0 +/-
0 +/- 0 1.0e6 s
Over Etch Time Percent
0
10 % 20 % 0 100 %
Pressure/Position Evacuation Condition
#pressure
#position
- - - - - - -
Pressure 10.0 5 +/- 10 +/- 0 100 mTorr
Throttle Valve Position Set Point
0 10 % 20 % 0 100 %
Process End Condition
#Time
#Endpoint
- - - - - - -
Recipe Restart Sequence Name
All Process Sequences Names
- - - - - - -
Recipe Abort Sequence Name All Process Sequences Names - - - - - - -
C4F8 0 8 +/- 20 +/- 0 420 sccm
SF6 0 12 +/- 30 +/- 0 653.4 sccm
Ar 0 1 +/- 2.5 +/- 0 48.5 sccm
O2 0 1 +/- 2.5 +/- 0 48.25 sccm
Gas1 Dump Valve Direction
#To PM
#To Pump
- - - - - - -
Gas2 Dump Valve Direction #To PM
#To Pump
- - - - - - -
He Cooler Mode
#pressure
#flow
- - - - - - -
He Cooler Pressure Setpoint
0 10 % 20 % 0 10000 mTorr
He Cooler Flow Setpoint 0 10 % 20 % 0 10.0 sccm
Bias RF Forward Setpoint
0 20 % 40 % 0 1500.0 V
Bias WaveformSetpoint
1 10 % 20 % 1 3  
IPC Forward Power Setpoint
1 10 % 20 % 400
3500 W
IPC Match Control Mode
#auto
#man->auto
#manual
#hold
#default
- - - - - - -
IPC Match Load Position
0 10 % 20 % 0 100.0 %
IPC Match Tune Position 0 10 % 20 % 0 100.0 %
Temperature Electrode Setpoint
25 5 +/- 10 +/- -40.0 40.0 C
Temperature Lid Setpoint 25 25 +/- 50 +/- 20.0 180.0 C
Temperature Liner Setpoint 25 25 +/- 50 +/- 20.0 180.0 C
Temperature Spool Setpoint 25 25 +/- 50 +/- 20.0 180.0 C
Execute if later Step Restarted
False - - - - - - -
External Detector Endpoint Recipe Name
#none
#test.ewr
- - - - - - -
Throttle Valve Overshoot Hold Time
0
10 % 20 % 0
10000 ms
Throttle Valve Overshoot 0
10
%
20
%
0
100
%
No Endpoint found alarm severity
#error
#warning
#none
-  - - - - - -
 IPC RF Reflected Power Error Timeout
 10000  0  %  0  %  0  60000  ms

 

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