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Process Step for Plasma-Therm High Density PECVD System

Process steps are added together to create process sequences for Versaline tools. This process step is the default step specific for the HD PECVD tool. It lists all the parameters and their limits to be used in recipe writing.

 

Default Process Step for Plasma-Therm High Density PECVD System

 

Parameter
Set Point
Soft Tolerance

Hard Tolerance

Min
Max
Units
Process Time
10.0 0 +/-
0 +/- 0 1.0e6 s
Over Etch Time Percent
0
10 % 20 % 0 100 %
Pressure/Position Evacuation Condition
#pressure
#position
- - - - - - -
Pressure 10.0 5 +/- 10 +/- 0 100 mTorr
Throttle Valve Position Set Point
0 10 % 20 % 0 100 %
Process End Condition
#Time
#Endpoint
- - - - - - -
Recipe Restart Sequence Name
All Process Sequences Names
- - - - - - -
Recipe Abort Sequence Name All Process Sequences Names - - - - - - -
N2a
0 1
+/- 2.5
+/- 0 49
sccm
SF6 0 2.6
+/- 6.5
+/- 0 136.24
sccm
O2
0 2.0
+/- 5.0
+/- 0 96.6
sccm
Ar
0 10.0
+/- 7.0
+/- 0 138.88
sccm
 N2b 0
10.0  +/-  25.0 +/- 0  491.0  sccm
 N2c 0 10.0  +/-  25.0  +/- 0  194.4  
 SiH4 0  12.9 +/-  3.0 +/-  0  36.72 sccm
 N2d 0 10.0
+/-  25.0 +/-  0  194. sccm
He Cooler Mode
#pressure
#flow
- - - - - - -
He Cooler Pressure Setpoint
0 10 % 20 % 0 10000 mTorr
He Cooler Flow Setpoint 0 10 % 20 % 0 10.0 sccm
Bias RF Forward Setpoint
0 20 % 20 % 0 600.0 V
IPC Forward Power Setpoint
0
10 % 20 % 0 2000 W
 Bias Match Control Mode  #auto
#man->auto
#manual
#hold
#default
 -  -  -  -  -  -  -
 Bias Match Load Position  0  10 %  20  %  0  100.0  %
 Bias Match Tune Position  0  10 %  20  %  0  100.0  %
IPC Match Control Mode
#auto
#man->auto
#manual
#hold
#default
- - - - - - -
IPC Match Load Position
0 10 % 20 % 0 100.0 %
IPC Match Tune Position 0 10 % 20 % 0 100.0 %
Temperature Electrode Setpoint
25 5 +/- 10 +/- 10.0 180.0 C
Temperature Lid Setpoint 25 25 +/- 50 +/- 20.0 180.0 C
Temperature Spool Setpoint 25 25 +/- 50 +/- 20.0 180.0 C
Execute if later Step Restarted
False - - - - - - -
External Detector Endpoint Recipe Name
#none
#test.ewr
- - - - - - -
No Endpoint found alarm severity
#error
#warning
#none
-  - - - - - -
 IPC RF Reflected Power Error Timeout
 10000  0  %  0  %  0  60000  ms

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