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STS Deep RIE Etcher, stsetch (semi-clean)

This is a IPC (Inductive Charged Plasma) Deep Reactive Ion etcher from Surface Technology Systems. The platform is single-chamber, manual loadlock system. The etch process is based on the patented Laermer and Schlip process, commonly referred to as the Bosch Process. The etch process alternates between the passivating C4F8 plasma and the silicon etching SF6 plasma.

STS Deep RIE Etcher, stsetch

This is a IPC (Inductive Charged Plasma) Deep Reactive Ion etcher from Surface Technology Systems. The platform is single-chamber, manual loadlock system. The etch process is based on the patented Laermer and Schlip process, commonly referred to as the Bosch Process. The etch process alternates between the passivating C4F8 plasma and the silicon etching SF6 plasma.

STS Deep RIE Etcher, stsetch - Read More…

Quick Start for Stsetch

Quick starts are very condensed versions of the more detailed and verbose Operating Instructions. Users of the etcher are responsible for having read and understood the Operating Instructions.

Quick Start for Stsetch - Read More…

SEM Images of Selected Process Qualification Wafers

This folder contains SEMs of qual wafers. Most of the images have been taken at the 20um pillars on a resolution mask.

SEM Images of Selected Process Qualification Wafers - Read More…

Characterization of a Time Multiplexed Inductively Coupled Plasma Etcher

A. A. Ayón, R. Braff, C. C. Lin, H. H. Sawin, and M. A. Schmidt. Journal of The Electrochemical Society, 146 (1) 339-349 (1999)

Characterization of a Time Multiplexed Inductively Coupled Plasma Etcher - Read More…

Effect of wafer holder on etch profiles & grass

Etches done with and without the aluminum wafer holder, showing the effect on the etch profiles and "grassing" (micromasking)

Effect of wafer holder on etch profiles & grass - Read More…

STS Deep RIE Etcher- Studies

This folder contains studies of various parameters and machine conditions. Often these studies are started during the trouble shooting process.

STS Deep RIE Etcher- Studies - Read More…

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