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You are here: Home / Equipment / Dry Etching / STS Deep RIE Etcher, stsetch (semi-clean) / Effect of wafer holder on etch profiles & grass

Effect of wafer holder on etch profiles & grass

Etches done with and without the aluminum wafer holder, showing the effect on the etch profiles and "grassing" (micromasking)

PDF document icon HolderGrass-1.pdf — PDF document, 280 kB (286825 bytes)

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