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You are here: Home / Equipment / Dry Etching / STS Deep RIE Etcher, stsetch (semi-clean) / SEM Images of Selected Process Qualification Wafers

SEM Images of Selected Process Qualification Wafers

This folder contains SEMs of qual wafers. Most of the images have been taken at the 20um pillars on a resolution mask.

Nov 18 2008 Process Qual

These SEMs are of the DEEP recipe run for 10 mins.

Nov 18 2008 Process Qual - Read More…

May 20 and July 22 2008

SEMs of process qual wafers from May and July of 2008. DEEP recipe was run for 10 minutes.

May 20 and July 22 2008 - Read More…

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