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You are here: Home / Equipment / Dry Etching / STS HRM Deep RIE Etcher, stsetch2 (semi-clean) / STSetch2 etch profile

STSetch2 etch profile

An example of high aspect ratio etch profile (thanks to Edwin Ng!)

PDF document icon EdwinNgstsetch2drie.pdf — PDF document, 415 kB (425321 bytes)

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