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Equipment Summary

A listing of all SNF equipment, its current status and staff in charge.

Electron Beam Writers, Scanning Electron Microscopes, and Maskmaking

Name

Equipment

Materials/
Equip Group

Process/
Training

Maintenance/
Repair

Super
Users

Training Hrs/
Notes

hummer

Hummer V Sputter Coater

Cont

James

Ted / James


1

raith

Raith 150 Electron Beam Lithography System

All

James

James


12 (a)

sem4160

Hitachi 4160 Scanning Electron Microscope

All

James

Ted / James


3

 

Optical Photolithography: Resist Coat

Name

Equipment Name

Materials/
Equip Group

Process/
Training

Maintenance/
Repair

Super Users

Training Hrs/
Notes

headway2

Headway Manual Resist Spinner

All

James

Mario  / Gary


3 (a)

laurell-R / laurell3

Laurell Manual Resist Spinner

All

Mahnaz

Mario  / Gary


0.5 (a)

svgcoat / svgcoat2

SVG Resist Coat Tracks 1&2

All

Uli / Mahnaz

Gary  / Mario


1.25 (a)

evgspraycoat
EVG 101 Resist Spray Coater
All
Mahnaz

Gary  / Mario

J / Robert
1.5 (a)

 

Optical Photolithography: Exposure

Name

Equipment Name

Materials/
Equip Group

Process/
Training

Maintenance/
Repair

Super Users

Training Hrs/
Notes

asml

ASML PAS 5500/60 i-line Stepper

All

1.Part: Mahnaz
-Job Writing

2.Part:Mahnaz

-Tool Training

Gary  / Mario


Job Writing: 2

Tool Training: 2 (a)

evalign

EV Group Contact Aligner

All

Mahnaz

Mario  / Gary


1.5 (a)

evg-imprint

EV Group Nanoimprint System

All

Mahnaz

Mario  / Gary


N/A

karlsuss / karlsuss2

Karl Suss MA-6 Contact Aligner 1&2

All

Uli/ Mahnaz 

Gary  / Mario


1.5 (a)

 

Optical Photolithography: Develop

Name

Equipment Name

Materials/
Equip Group

Process/
Training

Maintenance/
Repair

Super Users

Training Hrs/
Notes

svgdev / svgdev2

SVG Resist Develop tracks 1&2

All

Uli / Mahnaz

Gary  / Mario


0.5 (a)

 

Optical Photolithography: Ovens

Name

Equipment Name

Materials/
Equip Group

Process/
Training

Maintenance/
Repair

Super Users

Training Hrs/
Notes

bluem

Blue M Programmable Oven

Cont

Mahnaz

Mario / Gary


0.5 (a)

fusion

Fusion UV Cure System

All

Mahnaz

Mario / Gary


TBD (a)

oven110

110 C Oven

All

Uli

Mario / Gary


(a)

oven90

90 C Oven

All

Uli

Mario / Gary


(a)

oven3

Mahnaz's Oven

All

Mahnaz

Mario / Gary


0.5 (a)

ovensinge

Singe Oven

All

Uli

Mario / Gary


(a)

uvcure

Ultraviolet Photoresist Cure

All

Mahnaz

Mario / Gary


TBD (a)

yes

YES Prime Oven

All

Uli / Mahnaz

Mario / Gary


(a)

 

Chemical Vapor Deposition (CVD): Low Pressure

Name

Equipment Name

Materials/
Equip Group

Process/
Training

Maintenance/
Repair

Super Users

Training Hrs/
Notes

teos2

teos2

Clean

Maurice

Ted / Ray


3 (b)

 thermcolto  Thermco LPCVD Low Temperature Oxide
Gold  Maurice  

Ted / Ray

   3 (b)

thermoconitride1

Thermo LPCVD Nitride

Clean

Maurice

Ted / Ray


(b)

thermocopoly1

Thermco LPCVD Poly

Clean

Maurice

Ted / Ray


(b)

thermocopoly2  

Thermco LPCVD Poly

 Gold Maurice  

Ted / Ray

   3 (b)

tylanbpsg

LPCVD BPSG

Clean/ Semiclean

Maurice / Nancy

Ted / Ray


3 (b)

tylannitride

LPCVD Nitride

Clean

Maurice / Nancy

Ted / Ray


4 (or 2 w/tylanpoly)  (b)

tylanpoly

LPCVD Polysilicon

Clean

Maurice / Nancy

Ted / Ray


3 (or 2 w/ tylannitride)  (b)

tylansige

LPCVD silicon Germanium Poly

Clean

Maurice

Ted / Ray


6 (b)

 

Chemical Vapor Deposition (CVD): Plasma Enhanced

Name

Equipment Name

Materials/
Equip Group

Process/
Training

Maintenance/
Repair

Super Users

Training Hrs/
Notes

sts

STS Plasma Enhanced CVD

Cont

TBA

Jim


2 X 1.25

tel

TEL Trias SPA Plasma Processing System

Clean

Peter

Ted


N/A

 hdpcvd PlasmaTherm Versaline HDP VCD System
All  Nancy
Jim M
 

Elmer / Mike

   1.0
 ccp PlasmaTherm Shuttlecock PECVD System
 All  Nancy
Jim M
 

Elmer / Mike

   1.0

 

Chemical Vapor Deposition (CVD):  Atomic Layer

Name

Equipment Name

Materials/
Equip Group

Process

Maintenance/
Repair

Super Users

Training Hrs/
Notes

savannah Savannah Atomic Layer Deposition System Gold Michelle 

J Provine
3.0
See equipment page
 fiji1/fiji2  Fiji Atomic Layer Deposition - semi-clean chamber and gold chamber
 Semi-Clean (Fiji1)
Gold (Fiji2)
Michelle   J Provine
3.0
see equipment page

 

Chemical Vapor Deposition (CVD):  Epitaxial

Name

Equipment Name

Materials/
Equip Group

Process/
Training

Maintenance/
Repair

Super Users

Training Hrs/
Notes

epi2

Applied Materials Centurion Epitaxial System

Clean

 Maurice

Elmer / Mike


2x2

Metallization and Sputtering

Name

Equipment Name

Materials/
Equip Group

Process/
Training

Maintenance/
Repair

Super Users
Training Hrs/
Notes

innotec

Innotec ES26C E-Gun Evaporator

Cont

James

Jim


2 X 3

metalica

Metallica Sputter System

Cont

James

Jim


2 X 3

intlvac_sputter
IntlVac Nanochrome I Sputter System

Clean/ Semiclean

Maurice

Jim


 

intlvac_evap IntlVac Nanochrome I Evaporator System

Clean/ Semiclean

Mahnaz Jim    

 

Dry Etching

Name

Equipment Name

Materials/
Equip Group

Process/
Training

Maintenance/
Repair

Super Users
Training Hrs/
Notes

amtetcher

AMT Oxide Plasma Etcher

Clean / Semiclean

Nancy

Elmer / Mike


1

drytek1

Drytek 100 Plasma Etcher

Cont

Nancy

Elmer / Mike


1 (c)

drytek2

Drytek 100 Plasma Etcher

Clean / Semiclean

 

Nancy

Elmer / Mike


1 (c)

drytek4

Drytek 100 Plasma Etcher

Cont

Nancy

Elmer / Mike


1 (c)

gasonics

Gasonics Aura Asher

Clean / Semiclean

see equipment page

Elmer / Mike


 

lampoly

Lam Research TCP 9400 Poly Etcher

Clean

Mary

Elmer / Mike


0.5

matrix

Matrix Plasma Resist Strip

Cont

Nancy

/ Uli

Elmer / Mike


0.5

mrc

MRC Reactive Ion Etcher

Cont

Nancy

Elmer / Mike


1.5

p5000etch

Applied Materials P5000 Etcher

Semiclean

Nancy

Elmer / Mike


1.5

 PT-DSE  Plasma Therm Versaline LL ICP Deep Silicon Etcher
 Cont  see equipment page
 

Elmer / Mike

   1.5
 PT-MTL  Plasma Therm Versaline LL ICP Metal Etcher
 Cont  see equipment page  

Elmer / Mike

   1.5
 PT-Ox  Plasma Therm Versaline LL ICP Dielectric Etcher
 Cont  see equipment page  

Elmer / Mike

   1.5

pquest

Plasma Quest ECR Etcher

Cont

Mary

Elmer / Mike


1

 Ox-35  Oxford III-V etcher
 Cont  see equipment page  

Elmer / Mike

   1.5

stsetch

STS Deep RIE Etcher

Clean

Nancy

Elmer / Mike


2

stsetch2

STS HRM Deep RIE Etcher

Clean

Mary/Jim M

Elmer / Mike


1

xactix

Xactix Xenon Difluoride Etcher

Clean / Semiclean /

Cont

Uli

Elmer / Mike


1

 

Annealing, Oxidation, and Doping

Name

Equipment Name

Materials/
Equip Group

Process/
Training

Maintenance/
Repair

Super Users
Training Hrs/
Notes

fga2

Forming Gas Anneal (formerly gaas23)

Cont

 Maurice

Ted / Ray


TBD

thermco1/2

Thermco Oxidation Furnace #1

Clean

Maurice

Ted / Ray


1 (b)

tylan1/2

Tylan #1 Oxidation Furnace

Clean

Maurice

Ted / Ray


3 (b)

tylan3

Tylan #3 Oxidation Furnace

Semiclean

Maurice

Ted / Ray

tylan4

Tylan #4 Oxidation Furnace

Cont

Maurice

Ted / Ray

tylan5

Boron Predep Furnace (BBr3)

Clean

 Maurice

Ted / Ra


(b)(d)

tylan6

Phos Predep Furnace (POCl3)

Clean

 Maurice

Ted / Ray


(b)(d)

tylanfga

H2 Anneal Furnace

Semiclean

 Maurice

Ted / Ray


3 (b)(d)

 

Rapid Thermal Annealing

Name

Equipment Name

Materials/
Equip Group

Process/
Training

Maintenance/
Repair

Super Users
Training Hrs/
Notes

aw610-l

AllWin 610 Rapid Thermal Annealer

Clean/Semi-clean
Maurice

Elmer / Mike


1

aw610-r

AllWin 610 Rapid Thermal Annealer

Cont

Maurice

Elmer / Mike


1

 

Wetbenches

Name

Equipment Name

Materials/
Equip Group

Process/
Training

Maintenance/
Repair

Super Users

Training Hrs/
Notes

cpd

Critical Point Dryer

Cont

Uli / Maurice

Jim / Mike


2

lithosolv

Lithography Solvent Bench

All

Uli / Mahnaz

Mario


(a)


Mask Scrubber

N/A

Mahnaz

Mario



wbclean-1 and 2 (former wbdiff)

Clean-1 and 2 Wetbench

Clean

Uli / Nancy

Jim / Ray


2.25

wbebeam

Ebeam Process Wetbench

All

James

James


NA

wbflexcorr-1 and-2 (former wbgaas)

Flexible Corrosive Wetbench and GaAs

All and GaAs

Uli / Mary

Jim / Ray


2.25

wbflexcorr-3 and 4 (former wbgen)

Flexible Corrosive Wetbench

All (no GaAs)

Uli / Mary

Jim / Ray


2.25

wbgen2-hp / wbgen2-rfx

Germanium wbgen-2

Clean Ge

Mary

Jim / Ray

WooShik

wbclean-1 and 2 required

wbmetal

Metal Wetbench

Semiclean

Uli / Nancy

Jim / Ray


.75

wbmiscres

Miscellaneous Photoresist Wetbench

All

Mahnaz / Uli

Mario


(a)

wbnitride

Nitride and Tweezer Cleaning Wetbench

Clean

Uli / Nancy

Jim / Ray


.75

wbnonmetal

Non-Metal Wetbench

Clean

Uli / Nancy

Jim / Ray


covered in wbclean-1 and2

wbdecon/clean-3 (former wbsilicide)

Decon and Clean-3 Wetbench

Clean

Uli / Nancy

Jim / Ray


wbclean-1 and 2 required

wbsolvent

Solvent Wetbench

All

Uli / Mary

Jim / Ray


.5

 

Wafer Bonding, Sawing, and Polishing

Name

Equipment Name

Materials/
Equip Group

Process/
Training

Maintenance/
Repair

Super Users
Training Hrs/
Notes

cmp

GnP Poli-400L

 Hardware for both contaminated and clean

Michelle

Jim H.

Gary Yama

 1.5

 evbond  EV Group Wafer Bonder  Cont  

Mahnaz/Mary

 

Mario / Gary

   4

ksbonder

Karl Suss Wafer Bonder

Clean

Mahnaz

Mario / Gary


1

wafersaw

K&S Wafer Saw

Cont

Mary / Maurice

Elmer / Cesar


1

 

Characterization and Testing

Name

Equipment Name

Materials/
Equip Group

Process/
Training

Maintenance/
Repair

Super Users
Training Hrs/
Notes

afm2

Digital Instruments Nanoscope 3000 AFM

All

James

 

Mario / Gary


3

alphastep

Alphastep 500 Profilometer

Cont

Uli

Mario / Gary


.25

CCI HD

non contact optical 3D Profiler with thin & thick film measurement capability

All

Uli

Gary / Mario

 


1

nanospec / nanospec2

Nanospec Film Thickness Measurement System

All

Uli

Gary / Mario


.25

prometrix

Prometrix Resistivity Mapping System

All

Uli / Maurice

Gary / Mario

 


.5

p2

Tencor P2 Profilometer

Semiclean/
Clean

Uli

Gary / Mario


.5

stresstest

Flexus 2320

All

Uli

Gary


.75

woollam

J.A. Woollam M2000 Spectroscopic Ellipsometer

All

Michelle

Gary


2

zygo

Zygo 3D Surface Profiler

All

Uli / Maurice

Ted / Jim


1

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