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Equipment Summary

A listing of all SNF, MOCVD, and ExFab equipment, its location, equipment group, and staff in charge.

Electron Beam Writer

Name
Equipment Name Materials/
Equip Group
Process/
Training
Maintenance/
Repair
Location
Training Hrs/
Notes
Raith 150 Electron beam writer
raith
All TBA TBA SNF 12 (a)

 

Optical Photolithography: Resist Coat, click here for summary

Name Equipment Name Materials/
Equip Group
Process/
Training
Maintenance/
Repair
Location
Training Hrs/
Notes
headway2 Headway Manual Resist Spinner All Mahnaz Mario  / Gary SNF
1 (a)
laurell-R
Laurell Manual Resist Spinner All Mahnaz Mario  / Gary SNF 1 (a)
svgcoat / svgcoat2 SVG Resist Coat Tracks 1&2 All Uli / Mahnaz Gary  / Mario SNF 1.25 (a)
evgspraycoat
EVG 101 Resist Spray Coater
All
Mahnaz Gary  / Mario SNF 1.5 (a)

 

Optical Photolithography: Exposure, click here for summary

Name Equipment Name Materials/
Equip Group
Process/
Training
Maintenance/
Repair
Location
Training Hrs/
Notes
asml ASML PAS 550 Optical Photolithography Overview 0/60 i-line Stepper All 1.Job Writing:
Mahnaz
2.Tool Training: Mahnaz
Gary  / Mario SNF
Job Writing: 2 Tool Training: 2 (a)
evalign EV Group Contact Aligner All Mahnaz Mario  / Gary SNF 1.5 (a)
 karlsuss / karlsuss2 Karl Suss MA-6 Contact Aligner 1&2  All  Uli/ Mahnaz  Gary   / Mario  SNF  1.5 (a)

 

ExFab: Patterning

Name Equipment Name Materials/
Equip Group
Process/
Training
Maintenance/
Repair
Location
Training Hrs/
Notes
3d-wax-printer
Solidscape 3D Wax Printer
Flexible
Michelle
Michelle
ExFab, 155
TBD
nanoinkjet
Fujifilm Dimatix Ink Jet Printer
Flexible
Michelle
Michelle
ExFab, 155
7.5 hrs for equipment,  additional Standard Staff Hourly Rates charged for ink forumulation training.
Nanoscribe
Nanoscribe Photonics GT
All
Swaroop
Swaroop
ExFab, Stinson
2 hrs
Heidelberg
Heidelberg MLA 150 All
Swaroop
Swaroop
ExFab, Stinson
2 hrs, "All Litho" pre-req
Optomec-Printer
Optomec Printer
Cont
Swaroop
Swaroop / Gary
ExFab, 155A
Introduction/design - 2 hrs
Hands-on training - 6 hrs
Demonstration - 6 hrs
Alveole Primo
Alveole Primo
Cont
Swaroop/Gaspard
Swaroop/Gaspard
Exfab, 151
2 hrs

 

Optical Photolithography: Develop, click here for summary

Name Equipment Name Materials/
Equip Group
Process/
Training
Maintenance/
Repair
Location
Training Hrs/
Notes
svgdev / svgdev2 SVG Resist Develop tracks 1&2 All Uli / Mahnaz Gary  / Mario SNF 0.5 (a)

 

Optical Photolithography: Ovens, click here for summary

Name Equipment Name Materials/
Equip Group
Process/
Training
Maintenance/
Repair
Location
Training Hrs/
Notes
bluem Blue M Programmable Oven Cont Mahnaz Mario / Gary SNF 0.5 (a)
oven110 110 C Oven All Uli Mario / Gary SNF (a)
oven90 90 C Oven All Uli Mario / Gary SNF (a)
ovensinge Singe Oven All Uli Mario / Gary SNF (a)
white-oven Mahnaz's Oven Cont Mahnaz Mario / Gary SNF
0.5 (a)
uvcure Ultraviolet Photoresist Cure All Mahnaz Mario / Gary SNF TBD (a)
yes YES Prime Oven All Uli / Mahnaz Mario / Gary SNF (a)

 

Chemical Vapor Deposition (CVD): Low Pressure, click here for summary

Badger
Lab Tab
- Sub Task
-
Tool
Equipment Name Materials/
Equip Group
Process/
Training
Maintenance/
Repair
Location
Training Hrs/
Notes
SNF-LPCVD-teos2 teos2 Clean Maurice Ted / Ray SNF 3 (b)
SNF-LPCVD-thermcolto Thermco LPCVD Low Temperature Oxide
Gold Maurice Ted / Ray SNF 3 (b)
SNF-LPCVD-thermoconitride1 Thermo LPCVD Nitride Clean Maurice Ted / Ray SNF 3 (b)
SNF-LPCVD-thermocopoly1 Thermco LPCVD Poly Clean Maurice Ted / Ray SNF 3 (b)
SNF-LPCVD-thermocopoly2 Thermco LPCVD Poly2 Gold Maurice Ted / Ray SNF 3 (b)
SNF-LPCVD-tylanbpsg
LPCVD BPSG Clean/ Semiclean Maurice Ted / Ray SNF 3 (b)
nSIL-Deposition-nanotube First Nano carbon nanotube CVD furnace Gold Xiaoqing/
Greg Pitner
Ted / Ray nSIL 3
nSIL-Deposition-CVD-Graphene Aixtron Black Magic graphene CVD furnace Gold Xiaoqing/ Chris Neumann, Yong Cheol Shin, Ning Wang Ted / Ray nSIL 1

 

Chemical Vapor Deposition (CVD): Plasma Enhanced, click here for summary

Name Equipment Name Materials/
Equip Group
Process/
Training
Maintenance/
Repair
Location
Training Hrs/
Notes
sts STS Plasma Enhanced CVD Cont Usha Jim SNF
2 X 1.25
hdpcvd PlasmaTherm Versaline HDP VCD System
All Usha/
Jim M
Elmer / Mike SNF 1.0
 ccp PlasmaTherm Shuttlecock PECVD System
All Usha/
Jim M
Elmer / Mike SNF 1.0

 

Chemical Vapor Deposition (CVD):

Name Equipment Name Materials/
Equip Group
Process
Maintenance/
Repair
Location
Training Hrs/
Notes
savannah Savannah Atomic Layer Deposition System Gold Michelle 
Jim SNF
3.0
See equipment page
 fiji1/fiji2 Fiji Atomic Layer Deposition - semi-clean chamber and gold chamber
Semi-Clean (Fiji1)
Gold (Fiji2)
Michelle Jim SNF 3.0
see equipment page
fiji3
Fiji Atomic Layer Deposition- gold chamber, dielectric dedicated
Gold Michelle Jim SNF covered in fiji1/2
mvd
Savannah/Plasma Cleaner in Glovebox System
Gold Michelle Jim SNF 3.0

 

Chemical Vapor Deposition (CVD):Epitaxial, click here or summary

Name Equipment Name Materials/
Equip Group
Process/
Training
Maintenance/
Repair
Location
Training Hrs/
Notes
SNF-epi2 Applied Materials Centurion Epitaxial System Clean Maurice Elmer / Mike SNF
2x2
MOCVD-aix200 Aixtron MOCVD - III-V system Cont Xiaoqing
Ted / Ray/ Jim MOCVD 2x2+final
MOCVD-aix-ccs Aixtron MOCVD - III-N system Cont Xiaoqing
Ted / Ray/ Jim MOCVD 2x2+final

Metallization and Sputtering, click here for summary

Name Equipment Name Materials/
Equip Group
Process/
Training
Maintenance/
Repair
Location
Training Hrs/
Notes
SNF-Metalization-Evaporation-innotec Innotec ES26C E-Gun Evaporator Cont Maurice Jim SNF
2 X 3
SNF-Metalica Metallica Sputter System Cont Xiaoqing/ Ludwig Galambos Jim SNF
3hr
SNF-Intlvac_sputter
IntlVac Nanochrome I Sputter System
Clean/ Semiclean Maurice Jim SNF
2 x 1
SNF-Metalization-Evaporation-intlvac_evap IntlVac Nanochrome I Evaporator System
Clean/ Semiclean Mahnaz Jim SNF 2

nSIL-Depostion-lesker-sputter Lesker Sputter
Cont Maurice Carsen EXFab 155A
1
nSIL-aja-evap AJA Evaporator
Cont Xiaoqing Carsen EXFab 155A
TBD
n Sil
-Deposition
- hummer
Hummer V Sputter Coater Cont TBD
Gary / Ted Exfab, 155A
1 hr
 SNSF-Evaporation-KJL  KJL Cont  Cliff  Cliff  SNSF  
 SNSF-Evaporation-MFS Small  MFS Small Cont  Tom Carver
  Tom Carver  SNSF  
 SNSF-Evaporation-MFS large
 MFS large Cont  Tom Carver
  Tom Carver  SNSF  
 SNSF-Sputtering-Oerlikon Leybold  Oerlikon Leybold    Tom Carver   Tom Carver  SNSF  

Ex Fab: Deposition

Badger Name
Equipment Name
Materials/
Equip Group
Process/
Training
Maintenance/
Repair
Location
Training Hrs/
Notes
parcoater PDS 2010 LABCOTER 2
Flexible Michelle
Ray ExFab, 155
3

Dry Etching

Badger
Lab Tab
- Sub Task
Tool
Equipment Name Materials/
Equip Group
Process/
Training
Maintenance/
Repair
Location
Training Hrs/
Notes
SNF-Dry Etching amtetcher AMT Oxide Plasma Etcher Clean / Semiclean Usha Elmer / Mike SNF
1
SNF-Dry Etching drytek2 Drytek 100 Plasma Etcher All Usha Elmer / Mike SNF 1 (c)
SNF-Dry Etching drytek4 Drytek 100 Plasma Etcher Cont Usha Elmer / Mike SNF 1 (c)
SNF-Dry Etching gasonics Gasonics Aura Asher Clean / Semiclean see equipment page Elmer / Mike SNF
SNF-Dry Etching lampoly Lam Research TCP 9400 Poly Etcher Clean Usha Elmer / Mike SNF 1
SNF-Dry Etching matrix Matrix Plasma Resist Strip Cont Usha / Uli Elmer / Mike SNF 0.5
SNF-Dry Etching mrc MRC Reactive Ion Etcher Cont Usha Elmer / Mike SNF 1.5
SNF-Dry Etching p5000etch Applied Materials P5000 Etcher Semiclean Usha Elmer / Mike SNF 1.5
SNF-Dry Etching
PT-DSE
Plasma Therm Versaline LL ICP Deep Silicon Etcher
Cont Usha

Elmer / Mike
SNF 1.5
SNF-Dry Etching
PT-MTL
Plasma Therm Versaline LL ICP Metal Etcher
Cont Usha
Elmer / Mike
SNF 1
SNF-Dry Etching 
PT-Ox
Plasma Therm Versaline LL ICP Dielectric Etcher
Cont Usha Elmer / Mike SNF 1
SNF-Dry Etching pquest Plasma Quest ECR Etcher Cont Usha Elmer / Mike SNF 1
SNF-Dry Etching
Ox-35
Oxford III-V etcher
Cont see equipment page Elmer / Mike SNF 1.5
SNF-Dry Etching
oxford-rie
Oxford Dielectric Etcher Cont Usha Elmer SNF 1
SNF-Dry Etching stsetch STS Deep RIE Etcher Clean Usha Elmer / Mike SNF 1
SNF-Dry Etching
uetch
SPTS uetch vapor etch
All Uli Jim  / Mike SNF 0.5
SNF-Dry Etching xactix Xactix Xenon Difluoride Etcher Clean / Semiclean /Cont Uli Elmer / Mike SNF 0.5
nSiL- Other
plasma-etch
Plasmaetch PE-50 Cont Sage Carsen SNF
Room 155
0.5
SNSF-FCR
Ion Mill
Intlvac Ion Mill Etcher Cont Cliff Cliff SNSF/ Spilker
Flexible Cleanroom

SNSF-NPCR
RIE: Oxford
PlasmaPro 80
Oxford PlasmaPro 80 - Reactive Ion etcher Cont Usha Cliff SNSF/ Spilker
Nanopatterning
Cleanroom
1

 

Annealing, Oxidation, and Doping, click here for summary

Name Equipment Name Materials/
Equip Group
Process/
Training
Maintenance/
Repair
Location
Training Hrs/
Notes
Thermco1-3 Thermco Oxidation Furnace
Clean Maurice Ted / Ray SNF
1 (b)
Thermco4
Thermco Oxidation Furnace Cont Maurice Ted / Ray SNF 1
TylanFGA FormingGas Anneal Furnace Semiclean Maurice Ted / Ray SNF 1
Tylan6
Phos Predep Furnace (POCl3) Clean Maurice Ted / Ray SNF (b)(d)
Tylan9 Forming Gas Anneal Furnace Cont Maurice Ted / Ray SNF 3 (b)(d)

 

Rapid Thermal Annealing, click here for summary

Name Equipment Name Materials/
Equip Group
Process/
Training
Maintenance/
Repair
Location
Training Hrs/
Notes
SNF-Annealing-aw610-l AllWin 610 Rapid Thermal Annealer Clean/Semi-clean
Maurice Elmer / Mike SNF
1
SNF-Annealing-aw610-r AllWin 610 Rapid Thermal Annealer Cont Maurice Elmer / Mike SNF
1
 

Wetbenches, click here for summary

Name Equipment Name Materials/
Equip Group
Process/
Training
Maintenance/
Repair
Location
Training Hrs/
Notes
cpd Critical Point Dryer Cont Uli / Maurice Jim / Mike SNF
2
lithosolv Lithography Solvent Bench All Uli / Mahnaz Mario SNF (a)

Mask Scrubber N/A Mahnaz Mario SNF
wbclean-1 and 2 (former wbdiff)
Clean-1 and 2 Wetbench
Clean Uli Jim / Gary SNF 2.25
wbebeam Ebeam Process Wetbench All TBA Gary  / Mario SNF NA
wbflexcorr-1 and-2 (former wbgaas)
Flexible Corrosive Wetbench and GaAs
All and GaAs
Uli / Mary Jim / Gary SNF 2.25
wbflexcorr-3 and 4 (former wbgen)
Flexible Corrosive Wetbench All (no GaAs)
Uli / Mary Jim / Gary SNF 2.25
wbgen2-hp / wbgen2-rfx Germanium wbgen-2 Clean Ge Mary
Jim / Gary SNF wbclean-1 and 2 required
wbmetal Metal Wetbench Semiclean Uli Jim / Gary SNF .75
wbmiscres Miscellaneous Photoresist Wetbench All
Mahnaz / Uli Mario / Gary SNF (a)
wbclean_res-
piranha-hf-hotphos
Clean_resist-piranha-HF Wet Bench
Clean Uli Jim / Gary SNF covered in wbclean-1 and2
wbdecon/clean-3 (former wbsilicide)
Decon and Clean-3 Wetbench
Clean Uli Jim / Gary SNF wbclean-1 and 2 required
wbflexsolv Solvent Wetbench All
Uli / Mary Jim / Gary  / Mario SNF .5

 

ExFab: Wet Processing

 

Name Equipment Name Materials/
Equip Group
Process/
Training
Maintenance/
Repair
Location
Training Hrs/
Notes
WbExfab_Solv
WbExfab_Solv
All
Swaroop
Gary
ExFab, Stinson
1 hr
Headway 3
Headway 3
All
Swaroop
Gary
ExFab, Stinson
1 hr
WbExfab_Dev
WbExfab_Dev
All
Swaroop
Gary
ExFab, Stinson
1 hr
Laurel_Dev-etch
Laurel_Dev-etch
All
Swaroop
Gary
ExFab, Stinson
2 hrs
Micromist-coater
Micromist Coater
Cont
Swaroop
Swaroop
ExFab, 155
2 hrs

 

Wafer Bonding, Sawing, and Polishing

Name Equipment Name Materials/
Equip Group
Process/
Training
Maintenance/
Repair
Location
Training Hrs/
Notes
nSIL-Machining-cmp GnP Poli-400L
Hardware for both contaminated and clean Michelle Gary Yama Jim H. room 159
1.5
SNF-Waferbond-evbond EV Group Wafer Bonder Cont Mahnaz/Mary Mario / Gary SNF
4
SNF-Waferbond-ksbonder Karl Suss Wafer Bonder Clean Mahnaz Mario / Gary SNF 1
 nSiL-Other-flipchipbonder  Finetech Lambda  Cont  Usha  Elmer  SNF/L106/107
(Stinson)
 1
nSIL-Machining-DISCO wafersaw DISCO Wafer Saw
Cont Xiaoqing, Usha Elmer/ Gary/ Ted room 159
1.5
nSIL-Machining-DISCO backgrind
 DISCO Backgrind
 Cont  Xiaoqing, Usha  TBD  room 159
 1.5
 nSIL-Machining-Lasercutter  Lasercutter  Cont  Ted  Ted  room155A 1.0
 nSIL-Machining-Micromill  Micromill  Cont  Elmer  Elmer  room155A  1.0

 

Characterization and Testing, click here for summary

Name Equipment Name Materials/
Equip Group
Process/
Training
Maintenance/
Repair
Location
Training Hrs/
Notes
nSil
-Characterization
 - afm2
Digital Instruments Nanoscope 3000 AFM All Mahnaz
Mario / Gary SNF
AFM-nsil required 3
nSil
-Characterization
 - alphastep
Alphastep 500 Profilometer Cont Uli Mario / Gary SNF .25
nanospec / nanospec2 Nanospec Film Thickness Measurement System All Uli Gary / Mario SNF .25
prometrix Prometrix Resistivity Mapping System All Uli / Maurice Gary / Mario SNF .5
p2 Tencor P2 Profilometer Semiclean/
Clean
Uli Gary / Mario SNF .5
nSil
-Characterization
 - s-neox
Sensofar S-neox, non contact 3D optical profiling
All Uli Gary / Mario SNF 1
stresstest Flexus 2320 All Uli Gary SNF .75
woollam J.A. Woollam M2000 Spectroscopic Ellipsometer All Michelle Gary SNF 2
micromanipulator6000   micromanipulator6000 IV-CV probe station All Xiaoqing Jim SNF 0.5
nSiL
-Characterization
-malvern-dls
Malvern Dynamic Light Scattering (DLS) Zetasizer
All
Michelle
TBD
Mavericks (Room 155)
NA
nSiL
-Characterization
-Sinton Lifetime Tester
Sinton Lifetime Tester
Cont
Swaroop
Jim
Exfab, 151
1 hr
nSiL
-Characterization
-AFM-Asylum
AFM-Asylum
Cont
Mahnaz
Gary
Exfab, 151
TBD
nSiL
-Characterization
-biologic
Bio-Logic Potentiostat
Flexible
Michelle
Michelle
ExFab, 155
TBD
nSiL
-Characterization
-jasco-uv-vis-nir

Jasco UV-Vis-NIR Spectrometer

Flexible

Michelle

Michelle

ExFab, 155

TBD

 

 Ex Fab: Controlled Environment

Name
Equipment Name
Materials/
Equip Group
Process/
Training
Maintenance/Repair
Location Training Hrs/
Notes
glovebox-l
Glovebox- side with spin coater
Flexible Michelle Ray ExFab, 155
TBD
glovebox-r
Glovebox- side with transfer station
Flexible Michelle Ray ExFab, 155
TBD
 fumehood1  Fumehood 1
Flexible
Michelle  Michelle ExFab, 155  NA
 fumehood2 Fumehood 2
Flexible
Michelle
Michelle
ExFab, 155
 NA
fumehood3
Fumehood 3
Flexible
Michelle
Michelle
ExFab, 155
 NA
fumehood4
Fumehood 4
Flexible
Michelle
Michelle
ExFab, 155
 NA

Ex Fab: Other 

Name Equipment Name
Materials/
Equip Group
Process/
Training
Maintenance/Repair Location Training Hrs/
Notes
centrifuge Fisher AccuSpin 24C
Flexible Michelle Michelle ExFab, 155
TBD
disperser IKA disperser
Flexible Michelle Michelle ExFab, 155
TBD
thinky-mixer
Thinky mixer
Flexible Michelle Michelle ExFab, 155
NA
sonicator
Q700 Probe Sonicator
Flexible
Michelle Michelle ExFab, 155
TBD
spincoat-g3p8
SCS G3P-8 Spin Coater
Flexible Michelle Gary ExFab, 155
TBD
hotplate-1 Torrey Pines Hotplate
Flexible
Michelle
Gary/Jim
ExFab, 155
NA
             

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