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Sputtering

Metalica Sputter System
Metalica is a metal sputter that was built “in-house” to provide flexible processing options for non-CMOS compatible materials. Two magnetron S-guns provide the high energy source for sputtering of the metal target. Metalica is classified as gold contaminated and provides non-directional thin film (< 1 um) deposition of Ti, Cu, Au, Al, Ag, Cr, Mo, Pd, Pt, W and NiCr.
Sputtering Papers
Contains a collection of scientific articles related to sputtering
Intlvac NanoChrome 1 Sputter
This folder contains information about the Intlvac sputtering system including Operating Instructions, Start-up Reports and other characterization reports.

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