IntlVac Nanochrome I Sputter System, intlvac_sputter
Picture and Location
The tool is located at XXYY on the Lab Map.
The system is only to be used for clean or semi-clean depositions, no gold category processing is allowed. If you have any questions regarding the use of the system, make sure to ask prior to loading your samples.
Performance of the Tool
What the Tool CAN do
- Sources provided by the SNF: Al, Al-1%Si, Al-2%Si, Al-1%Si-0.5%Cu, Co, Cr, Hf, Mo, Nb, Ni, Ni-7%V Pd, Pt, Si(B), Ta, Ti, TiW, V, W and Zr.
- Reactive depositions of oxides and nitrides is possible for many of these materials.
- Pt deposition is allowed, but you must provide your own sputter target.
What the Tool CANNOT do
- Item A.
Contact List and How to Become a User
The following people make up the Tool Quality Circle:
- Process Staff:
- Maintenance: Jim Haydon
Training to Become a Tool User
Training consists of three steps. Step one is a review of your process requirements with the listed process staff. This review is to make sure your requirements match the capability of the tool and to decide on the best approach to meeting your requirements. The second step is a general training at the system to review the the system, it's configuration, software and to discuss the correct protocol while using the system. The third step is have the staff present at check-out or your first run. Once all three steps have successfully been completed, you will receive an individual log-in account on the system.
System Start-Up Report
Process Monitoring and Machine Qualification
Tool Qualification Run
Recommendation to users with critical processes
Machine Status States
Process Monitoring Results
Al-1%Si 400w dual AC ~93A/min
Al-1%Si 500w dual AC ~143A/min
Al-1%Si 900w dual AC ~320A/min