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Intlvac_Sputter

File Intlvac_Sputter Start-Up Report
This document is data collected during the initial start-up and characterization of the Intlvac_sputter system
File EE412 Intlvac Sputter Final Report 2011
Characterization report covering Al, SiO2, W and Ti from an EE412 project in 2011

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