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EE412 Final Reports

Here are the final reports fro EE412 that used the Intelvac.


Areas of Interest
 Project Name
Primary Lab Tools Used
 Researcher and (Mentor)
 Low temp deposition of Ti, SiO2 and W
 Sputtering Deposition of Metal and Dielectric Films
 Intelvac sputterer
 Vijay Parameshwaran
(Ed Myers)

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